Cyclic olefin polymers and catalyst for semiconductor applications
원문보기
IPC분류정보
국가/구분
United States(US) Patent
공개
국제특허분류(IPC7판)
H01L-021/31
H01L-021/02
H01L-021/50
출원번호
US-0976627
(2004-10-29)
공개번호
US-0094258
(2006-05-04)
발명자
/ 주소
Lehman,Stephen
출원인 / 주소
Lehman,Stephen
대리인 / 주소
BLAKELY SOKOLOFF TAYLOR &
인용정보
피인용 횟수 :
0인용 특허 :
0
초록▼
An embodiment is a cyclic olefin semiconductor package. Further an embodiment is a combination of a cyclic olefin monomer and a ruthenium-based catalyst that is stable at approximately room temperature and humidity for extended storage life and pot life, and that can be screen printed or valve/jet
An embodiment is a cyclic olefin semiconductor package. Further an embodiment is a combination of a cyclic olefin monomer and a ruthenium-based catalyst that is stable at approximately room temperature and humidity for extended storage life and pot life, and that can be screen printed or valve/jet deposited.
대표청구항▼
What is claimed is: 1. A method of semiconductor packaging comprising: mixing a cyclic olefin monomer with a ruthenium-based catalyst; depositing the mixture of cyclic olefin monomer and ruthenium-based catalyst on a substrate including a semiconductor device; heating the mixture of cyclic olefin
What is claimed is: 1. A method of semiconductor packaging comprising: mixing a cyclic olefin monomer with a ruthenium-based catalyst; depositing the mixture of cyclic olefin monomer and ruthenium-based catalyst on a substrate including a semiconductor device; heating the mixture of cyclic olefin monomer and ruthenium-based catalyst to form a cyclic olefin package on the semiconductor device. 2. The method of claim 1, heating the mixture of cyclic olefin monomer and ruthenium-based catalyst further comprising: initiating a ring opening metathesis polymerization. 3. The method of claim 2, depositing the mixture of cyclic olefin monomer and ruthenium-based catalyst further comprising screen printing the mixture. 4. The method of claim 3, depositing the mixture of cyclic olefin monomer and ruthenium-based catalyst further comprising valve depositing the mixture. 5. The method of claim 4, depositing the mixture of cyclic olefin monomer and ruthenium-based catalyst further comprising jet depositing the mixture. 6. The method of claim 2 wherein the cyclic olefin monomer comprises a compound selected from the group consisting of dicyclopentadiene, substituted dicyclopentadiene, norbornene, substituted norbornene, cyclooctene, substituted cyclooctene, and combinations thereof. 7. The method of claim 2 wherein the ruthenium-based catalyst has a formula of RuX2L2CR1R2 for which: X includes a halogen or alkoxide group, L is a member of the imidazol-2-ylidene ligand group with N-substituents, R1 includes a hydrogen, an aryl group, a branched alkyl group, or a linear alkyl group; and R2 is a imidazol-2-ylidene ring substituent and includes a hydrogen, an aryl group, a branched alkyl group, or a linear alkyl group. 8. The method of claim 7 wherein C3 and C4 of the R2 imidazol-2-ylidene ring is substituted with groups selected from the group consisting of hydrogen, aryl, ester, carboxylic acid, amine, amide, a linear hydrocarbon, and a branched hydrocarbon, and a combination thereof. 9. The method of claim 1, heating the mixture of cyclic olefin monomer and ruthenium-based catalyst further comprising: activating the polymerization of the mixture of cyclic olefin monomer and ruthenium-based catalyst by maintaining the mixture of cyclic olefin monomer and ruthenium-based catalyst at approximately between 40째 C. and 250째 C. for approximately between 1 and 6 hours. 10. A method comprising: depositing a mixture of cyclic olefin monomer and ruthenium-based catalyst on a substrate including a semiconductor device; initiating a ring opening metathesis polymerization in the mixture of cyclic olefin monomer and ruthenium-based catalyst to form a cyclic olefin package on the semiconductor device. 11. The method of claim 10 wherein the cyclic olefin monomer comprises a compound selected from the group consisting of dicyclopentadiene, substituted dicyclopentadiene, norbornene, substituted norbornene, cyclooctene, substituted cyclooctene, and a combination thereof. 12. The method of claim 10 wherein the ruthenium-based catalyst has a formula of RuX2L2CR1R2 for which: X includes a halogen or alkoxide group, L is a member of the imidazol-2-ylidene ligand group with N-substituents, R1 includes a hydrogen, an aryl group, a branched alkyl group, or a linear alkyl group; and R2 is a imidazol-2-ylidene ring substituent and includes a hydrogen, an aryl group, a branched alkyl group, or a linear alkyl group. 13. The method of claim 12 wherein C3 and C4 of the R2 imidazol-2-ylidene ring is substituted with groups selected from the group consisting of hydrogen, aryl, ester, carboxylic acid, amine, amide, a linear hydrocarbon, and a branched hydrocarbon, and a combination thereof. 14. The method of claim 10, initiating a ring opening metathesis polymerization in the mixture of cyclic olefin monomer and ruthenium-based catalyst further comprising: heating the mixture of cyclic olefin monomer and ruthenium-based catalyst to a temperature approximately between 40째 C. and 250째 C.; and maintaining the temperature for approximately between 1 and 6 hours. 15. An apparatus comprising: a substrate including a semiconductor device; and a cyclic olefin polymer coupled to the semiconductor device 16. The apparatus of claim 15 wherein the cyclic olefin polymer comprises a package for the semiconductor device. 17. The apparatus of claim 16 wherein the cyclic olefin polymer is selected from the group consisting of dicyclopentadiene, substituted dicyclopentadiene, norbornene, substituted norbornene, cyclooctene, substituted cyclooctene, and a combination thereof.
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