[미국특허]
Systems and methods for statistical process control
원문보기
IPC분류정보
국가/구분
United States(US) Patent
공개
국제특허분류(IPC7판)
G05B-013/02
G06F-017/18
G06F-019/00
G06F-015/00
출원번호
US-0989494
(2004-11-17)
공개번호
US-0106469
(2006-05-18)
발명자
/ 주소
Huang,Ming Chang
Chen,Ming Fa
출원인 / 주소
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
대리인 / 주소
BIRCH STEWART KOLASCH &
인용정보
피인용 횟수 :
0인용 특허 :
0
초록▼
A system for performing statistical process control. A storage device stores a plurality of SPC charts, specifying data collected from a system during testing. A controller categorizes the SPC charts into a plurality of groups based on characteristics thereof. A detector determines whether the chart
A system for performing statistical process control. A storage device stores a plurality of SPC charts, specifying data collected from a system during testing. A controller categorizes the SPC charts into a plurality of groups based on characteristics thereof. A detector determines whether the charts in any of the groups violate a preset rule. An alarm generator generates alarm information identifying the chart violating the rule.
대표청구항▼
What is claimed is: 1. A system for statistical process control, comprising: a storage device storing a plurality of SPC charts, specifying data collected from a system during testing; a controller categorizing the SPC charts to a plurality of groups based on characteristics thereof; and a detect
What is claimed is: 1. A system for statistical process control, comprising: a storage device storing a plurality of SPC charts, specifying data collected from a system during testing; a controller categorizing the SPC charts to a plurality of groups based on characteristics thereof; and a detector determining whether the charts within one of the groups violate a preset rule. 2. The system of claim 1, wherein the rule specifies a threshold of a manufacturing constant selected from a manufacturing target and a specification limit. 3. The system of claim 2, wherein the specification limit comprises an upper specification limit and/or a lower specification limit. 4. The system of claim 1, wherein the rule specifies a threshold of a statistical parameter of Cp, K, or Cpk. 5. The system of claim 1, wherein the rule identifies an indicator variable of the chart as a detection target. 6. The system of claim 5, wherein the indicator variable is derived from the latest data entry in the chart. 7. The system of claim 5, wherein the indicator variable is derived from a preset number of data entries. 8. The system of claim 5, wherein the indicator variable is derived from-data entries collected within a preset time period. 9. The system of claim 1, further comprising an alarm generator generating alarm information identifying charts violating the rule. 10. The system of claim 9, wherein the alarm generator transmits the alarm information through a network. 11. A computer-implemented method of statistical process control (SPC), comprising: providing a plurality of SPC charts, specifying data collected from a system during testing; categorizing the SPC charts into a plurality of groups based on characteristics thereof; and determining whether the charts within one of the group violate a preset rule. 12. The method of claim 11, further comprising defining the rule using a manufacturing constant, such as a manufacturing target, upper specification limit, or lower specification limit. 13. The method of claim 11, further comprising defining the rule using a statistical parameter of Cp, K, or Cpk. 14. The method of claim 11, further comprising identifying an indicator variable of the chart as a detection target. 15. The method of claim 14, further comprising identifying the indicator variable using the latest data entry in the chart. 16. The method of claim 14, further comprising identifying the indicator variable using a preset number of data entries. 17. The method of claim 14, further comprising identifying the indicator variable using data entries collected within a preset time period. 18. The method of claim 10, further comprising generating alarm information identifying the chart violating the rule. 19. The method of claim 18, further comprising transmitting the alarm information through a network. 20. A computer readable storage medium storing a computer program providing a method of statistical process control (SPC), comprising: receiving a plurality of SPC charts, specifying data collected from a system during testing; categorizing the SPC charts into a plurality of groups based on characteristics thereof; and determining whether the chart in any of the group violates a preset rule. 21. The storage medium of claim 20, wherein the method further comprises defining the rule using a manufacturing constant, such as a manufacturing target, upper specification limit, or lower specification limit. 22. The storage medium of claim 20, wherein the method further comprises defining the rule using a statistical parameter of Cp, K, or Cpk. 23. The storage medium of claim 20, wherein the rule identifies an indicator variable of the chart as a detection target, and the indicator variable is derived from the latest data entry in the chart, preset number of data entries, or data entries collected within a preset time period. 24. The storage medium of claim 20, wherein the method further comprises generating alarm information identifying the chart violating the rule
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