A vertical comb-drive actuator comprising a support base and a movable body is described. The support base comprises first comb electrodes and a first surface wherein the first comb electrodes extend from the first surface. The movable body attached to the support base comprises second comb electrod
A vertical comb-drive actuator comprising a support base and a movable body is described. The support base comprises first comb electrodes and a first surface wherein the first comb electrodes extend from the first surface. The movable body attached to the support base comprises second comb electrodes and a second surface wherein the second comb electrodes extend from the second surface. The movable body may rotate about a rotation axis and the first comb electrodes are interdigitated with the second comb electrodes correspondingly. The second comb electrodes extend along a first direction, the rotation axis extends along a second direction, and the first comb electrodes extend along a third direction. The distance between the first lateral face of the first comb electrode and the second surface is shorter than the second length defined as the distance between the end surface of the second comb electrode and the second surface.
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1. A comb-drive actuator, comprising: a support base, comprising at least one first comb electrode and a first surface wherein the at least one first comb electrode extends from the first surface; anda movable body attached to the support base and comprising at least one second comb electrode and a
1. A comb-drive actuator, comprising: a support base, comprising at least one first comb electrode and a first surface wherein the at least one first comb electrode extends from the first surface; anda movable body attached to the support base and comprising at least one second comb electrode and a second surface wherein the at least one second comb electrode extends from the second surface, wherein the movable body is allowed to rotate about a rotation axis and the at least one first comb electrode is interdigitated with the at least one second comb electrode;wherein the at least one second comb electrode extends along a first direction, the rotation axis extends along a second direction, the at least one first comb electrode extends along a third direction, a distance between a first lateral face of the first comb electrode of the support base and a second surface is shorter than a second length defined as the distance between an end surface of the second comb electrode of the movable body and the second surface, and the first lateral face is disposed between a second lateral face of the first comb electrode and the end surface along the first direction. 2. The comb-drive actuator of claim 1, wherein the first direction, the second direction, and the third direction are different directions. 3. The comb-drive actuator of claim 1, wherein the first direction, the second direction, and the third direction are perpendicular to each other. 4. The comb-drive actuator of claim 1, wherein when the movable body is not rotated in rest position, a first length of the first comb electrode along the first direction is shorter than the second length of the second comb electrode along the first direction, and the first length is defined as a distance between the first lateral face and the second lateral face. 5. The comb-drive actuator of claim 1, wherein when the movable body is not rotated in rest position, the distance between the first lateral face of the first comb electrode of the support base and the second surface is shorter than the second length. 6. The comb-drive actuator of claim 1, wherein when the movable body is not rotated in rest position, an area of the at least one first comb electrode and an area of the at least one second comb electrode projected onto a plane defined by the first direction and the third direction are either partially overlapped or not overlapped. 7. The comb-drive actuator of claim 1, wherein when the movable body is rotated about the rotation axis, a first length of the at least one first comb electrode along the first direction is shorter than the second length of the at least one second comb electrode along the first direction. 8. The comb-drive actuator of claim 1, wherein when the movable body is rotated about the rotation axis, the first lateral face is disposed between a lower edge of the end surface and the second lateral face along the first direction, and wherein the lower edge is approaching the first comb electrode. 9. The comb-drive actuator of claim 1, wherein the support base comprises two sets of the first comb electrode units, each set of the first comb electrode units comprises a plurality of first comb electrodes, and the two sets of the first comb electrode units are disposed on the opposite sides of the rotation axis respectively. 10. The comb-drive actuator of claim 9, wherein the movable body comprises two sets of the second comb electrode units, each set of the second comb electrode unit comprises a plurality of second comb electrodes and the two sets of the second comb electrode units are disposed on the opposite sides of the rotation axis respectively. 11. The comb-drive actuator of claim 10, wherein an electrical potential difference is applied between one of the two sets of the first comb electrode units and one of the two sets of the second comb electrode units to drive the movable body to rotate about the rotation axis. 12. The comb-drive actuator of claim 10, wherein a periodically varying electrical potential difference is applied between the two sets of the first comb electrode units and the two sets of the second comb electrode units to drive the movable body to rotate about the rotation axis in a bidirectional and reciprocal oscillation motion. 13. The comb-drive actuator of claim 10, wherein the two sets of the first comb electrode units disposed on the opposite sides of the rotation axis are electrically isolated. 14. The comb-drive actuator of claim 1, wherein the movable body is attached to the support base by torsion bars such that the movable body is allowed to rotate about the rotation axis of the torsion bars. 15. The comb-drive actuator of claim 1, wherein the end surfaces of the second comb electrodes are interconnected to each other. 16. The comb-drive actuator of claim 1, wherein the second surface and the end surface of at least two adjacent comb electrodes of the second comb electrodes form a closed region. 17. The comb-drive actuator of claim 16, wherein a first distance between the first lateral face of the first comb electrode and a third surface is equal to a second distance between the second lateral face of the first comb electrode and the second surface and wherein the third surface is opposite to the first lateral face inside the closed region. 18. The comb-drive actuator of claim 16, wherein a first distance between the first lateral face of the first comb electrode and a third surface is not equal to a second distance between the second lateral face of the first comb electrode and the second surface and wherein the third surface is opposite to the first lateral face inside the closed region. 19. A comb-drive actuator, comprising: a support base, comprising at least one first comb electrode, a first surface wherein the at least one first comb electrode extends from the first surface; anda movable body attached to the support base and comprising at least one second comb electrode and a second surface wherein the at least one second comb electrode extends from the second surface wherein the movable body is allowed to rotate about a rotation axis and the at least one second comb electrode is interdigitated with the at least one first comb electrode;wherein the at least one second comb electrode extends along a first direction, the rotation axis extends along a second direction, the at least one first comb electrode extends along a third direction, a distance between a first lateral face of the first comb electrode of the support base and a second surface is shorter than a second length defined as the distance between an end surface of the second comb electrode of the movable body and the second surface, and the first lateral face is disposed between a second lateral face of the first comb electrode and the end surface along the first direction;wherein the support base further comprises at least one third comb electrode extending from the first surface, and a distance between a third lateral face of the third comb electrode and the second surface is longer than the second length between the end surface of second comb electrode and the second surface. 20. The comb-drive actuator of claim 19, wherein the first direction, the second direction, and the third direction are different directions. 21. The comb-drive actuator of claim 19, wherein the first direction, the second direction, and the third direction are perpendicular to each other. 22. The comb-drive actuator of claim 19, wherein when the movable body is not rotated in rest position, a first length of the first comb electrode along the first direction is shorter than the second length of the second comb electrode along the first direction and the first length is defined as a distance between the first lateral face and the second lateral face. 23. The comb-drive actuator of claim 19, wherein when the movable body is not rotated in rest position, the distance between the first lateral face of the first comb electrode of the support base and the second surface is shorter than the second length. 24. The comb-drive actuator of claim 19, wherein when the movable body is not rotated in rest position, an area of the at least one first comb electrode and an area of the at least one second comb electrode projected onto a plane defined by the first direction and the third direction are either partially overlapped or not overlapped. 25. The comb-drive actuator of claim 19, wherein when the movable body is rotated about the rotation axis, a first length of the at least one first comb electrode along the first direction is shorter than the second length of the at least one second comb electrode along the first direction. 26. The comb-drive actuator of claim 19, wherein when the movable body is rotated about the rotation axis, the first lateral face is disposed between a lower edge of the end surface and the second lateral face along the first direction, and wherein the lower edge is approaching the first comb electrode. 27. The comb-drive actuator of claim 19, wherein the first length of the at least one first comb electrode along the first direction is shorter than a third length of the at least one third comb electrode wherein the third length is defined as the distance between a third lateral face and a second lateral face of the third comb electrode along the first direction. 28. The comb-drive actuator of claim 19, wherein the support base comprises two sets of the first comb electrode units, each set of the first comb electrode units comprises a plurality of first comb electrodes and the two sets of the first comb electrode units are disposed on the opposite sides of the rotation axis, and two sets of the third comb electrodes units, each set of the third comb electrode units comprises a plurality of third comb electrodes and the two sets of the third comb electrode units are disposed on the opposite sides of the rotation axis, respectively. 29. The comb-drive actuator of claim 28, wherein the movable body comprises two sets of the second comb electrode units, each set of the second comb electrode unit comprises a plurality of second comb electrodes and the two sets of the second comb electrode units are disposed on the opposite sides of the rotation axis respectively. 30. The comb-drive actuator of claim 28, wherein the two sets of the first comb electrode units are electrically isolated for electrodes located on the opposite sides of the rotation axis, and the two sets of the third comb electrode units are electrically isolated for electrodes located on the opposite sides of the rotation axis. 31. The comb-drive actuator of claim 30, wherein an electrical potential difference is applied between one of the two sets of the first comb electrode units and one of the two sets of the third comb electrode units, and one of the two sets of the second comb electrode units to drive the movable body to rotate about the rotation axis. 32. The comb-drive actuator of claim 30, wherein a periodically varying electrical potential difference is applied between the two sets of the first comb electrode units and the two sets of the third comb electrode units, and the two sets of the second comb electrode units to drive the movable body to rotate about the rotation axis in a bidirectional and reciprocal oscillation motion. 33. The comb-drive actuator of claim 19, wherein the movable body is attached to the support base by torsion bars such that the movable body is allowed to rotate about the rotation axis of the torsion bars.
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