This SiC heater includes a heating element having a thin plate-shaped silicon carbide sintered body and an insulating coat film formed on a surface of the silicon carbide sintered body, a pair of electrodes for conducting electricity in the heating element, and a heater base that holds the heating e
This SiC heater includes a heating element having a thin plate-shaped silicon carbide sintered body and an insulating coat film formed on a surface of the silicon carbide sintered body, a pair of electrodes for conducting electricity in the heating element, and a heater base that holds the heating element from one surface side while insulating the heating element from heat from the heating element, the insulating coat film is located on a surface of the silicon carbide sintered body opposite to the heater base, an electrical resistivity at room temperature of the insulating coat film is 109 Ω·cm or more, a thermal expansion coefficient of the insulating coat film is 2×10−6/K or more and 6×10−6/K or less, SiO2 is included as a matrix, 1% by weight or more and 35% by weight or less of a first additive component including at least one of B2O3 and Al2O3 is contained, and 1% by weight or more and 35% by weight or less of a second additive component including at least one of MgO and CaO is contained.
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1. A SiC heater comprising: a heating element comprising a thin plate-shaped silicon carbide sintered body and an insulating coat film formed on a surface of the silicon carbide sintered body;a pair of electrodes for conducting electricity in the heating element; anda heater base that holds the heat
1. A SiC heater comprising: a heating element comprising a thin plate-shaped silicon carbide sintered body and an insulating coat film formed on a surface of the silicon carbide sintered body;a pair of electrodes for conducting electricity in the heating element; anda heater base that holds the heating element from one surface side while blocking the heat from the heating element,wherein the insulating coat film is located on a surface of the silicon carbide sintered body, the surface being on the reverse side of the heater base-side surface,an electrical resistivity at room temperature of the insulating coat film is 109 Ω·cm or more,a thermal expansion coefficient of the insulating coat film is 2×10−6/K or more and 6×10−6/K or less,the insulating coat film includes SiO2 as a matrix,the insulating coat film contains a first additive component including at least one of B2O3 and Al2O3,a proportion of the first additive component is 1% by weight or more and 35% by weight or less of a total weight of the insulating coat film,the insulating coat film contains a second additive component including at least one of MgO and CaO, anda proportion of the second additive component is 1% by weight or more and 35% by weight or less of the total weight of the insulating coat film. 2. The SiC heater according to claim 1, wherein the second additive component further includes BaO. 3. The SiC heater according to claim 2, wherein the second additive component includes all of BaO, MgO, and CaO. 4. The SiC heater according to claim 3, wherein a total of contents of MgO and CaO of the second additive component is equal to or more than and twice or less than a content of BaO. 5. The SiC heater according to claim 1, wherein a shape of the heating element is a substantial S shape in a plan view having two slits notched from two facing sides of a substantially square shape or a substantially rectangular shape in a plan view toward opposite sides respectively, and both end portions of the substantial S shape are respectively connected to the pair of electrodes. 6. The SiC heater according to claim 1, wherein the insulating coat film is made of at least one of borosilicate glass or aluminosilicate glass. 7. The SiC heater according to claim 1, wherein a proportion of the first additive component is 1% by weight or more and 30% by weight or less of the total weight of the insulating coat film. 8. The SiC heater according to claim 1, wherein a bonded sintered body density of the silicon carbide sintered body is 2.5 g/cm3 or more, and an electrical resistivity at 25° C. is 0.1 Ω·cm or more and 100 Ω·cm or less. 9. The SiC heater according to claim 2, wherein a shape of the heating element is a substantial S shape in a plan view having two slits notched from two facing sides of a substantially square shape or a substantially rectangular shape in a plan view toward opposite sides respectively, and both end portions of the substantial S shape are respectively connected to the pair of electrodes. 10. The SiC heater according to claim 2, wherein the insulating coat film is made of at least one of borosilicate glass or aluminosilicate glass. 11. The SiC heater according to claim 2, wherein a proportion of the first additive component is 1% by weight or more and 30% by weight or less of the total weight of the insulating coat film. 12. The SiC heater according to claim 2, wherein a sintered body density of the silicon carbide sintered body is 2.5 g/cm3 or more, and an electrical resistivity at 25° C. is 0.1 Ω·cm or more and 100 Ω·cm or less. 13. The SiC heater according to claim 3, wherein a shape of the heating element is a substantial S shape in a plan view having two slits notched from two facing sides of a substantially square shape or a substantially rectangular shape in a plan view toward opposite sides respectively, and both end portions of the substantial S shape are respectively connected to the pair of electrodes. 14. The SiC heater according to claim 3, wherein the insulating coat film is made of at least one of borosilicate glass or aluminosilicate glass. 15. The SiC heater according to claim 3, wherein a proportion of the first additive component is 1% by weight or more and 30% by weight or less of the total weight of the insulating coat film. 16. The SiC heater according to claim 3, wherein a sintered body density of the silicon carbide sintered body is 2.5 g/cm3 or more, and an electrical resistivity at 25° C. is 0.1 Ω·cm or more and 100 Ω·cm or less. 17. The SiC heater according to claim 4, wherein a shape of the heating element is a substantial S shape in a plan view having two slits notched from two facing sides of a substantially square shape or a substantially rectangular shape in a plan view toward opposite sides respectively, and both end portions of the substantial S shape are respectively connected to the pair of electrodes. 18. The SiC heater according to claim 4, wherein the insulating coat film is made of at least one of borosilicate glass or aluminosilicate glass. 19. The SiC heater according to claim 4, wherein a proportion of the first additive component is 1% by weight or more and 30% by weight or less of the total weight of the insulating coat film. 20. The SiC heater according to claim 4, wherein a sintered body density of the silicon carbide sintered body is 2.5 g/cm3 or more, and an electrical resistivity at 25° C. is 0.1 Ω·cm or more and 100 Ω·cm or less.
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