[미국특허]
Flexible Piezo-Composite Sensors and Transducers
원문보기
IPC분류정보
국가/구분
United States(US) Patent
공개
국제특허분류(IPC7판)
H01L-041/18
H01L-041/113
H01L-041/37
H01L-041/047
H01L-041/187
출원번호
16808786
(2020-03-04)
공개번호
20200287123
(2020-09-10)
발명자
/ 주소
Jiang, Xiaoning
Kim, Taeyang
Zhu, Yong
출원인 / 주소
Jiang, Xiaoning
인용정보
피인용 횟수 :
0인용 특허 :
0
초록▼
Disclosed are various embodiments for a piezo-composite transducer that is flexible such that it may conform to regular or irregular shapes. A flexible piezo-composite transducer may include an active piezoelectric material, such as PZT-5H, and a passive polymer matrix formed of a flexible material,
Disclosed are various embodiments for a piezo-composite transducer that is flexible such that it may conform to regular or irregular shapes. A flexible piezo-composite transducer may include an active piezoelectric material, such as PZT-5H, and a passive polymer matrix formed of a flexible material, such as polydimethylsiloxane (PDMS). The flexible piezo-composite transducer may include a first side and a second side, where each of the first side and the second side include a first electrode and a second electrode deposited thereon, respectively. At least one of the first electrode and the second electrode may include a silver nanowire (AgNW) and PDMS electrode that is flexible.
대표청구항▼
1. A system, comprising: a flexible 1-3 piezo-composite transducer comprising: a plurality of 1-3 composite pillars extending upwardly from a transducer substrate, individual ones of the plurality of 1-3 composite pillars formed of an active piezo-electric material, the active piezo-electric materia
1. A system, comprising: a flexible 1-3 piezo-composite transducer comprising: a plurality of 1-3 composite pillars extending upwardly from a transducer substrate, individual ones of the plurality of 1-3 composite pillars formed of an active piezo-electric material, the active piezo-electric material comprising lead zirconate titanate (PZT-5H) ceramic; anda passive polymer matrix formed of a flexible material positioned between the plurality of 1-3 composite pillars, the flexible material comprising polydimethylsiloxane (PDMS);a first electrode positioned on each side of the flexible 1-3 piezo-composite transducer; anda second electrode positioned on each side of the flexible 1-3 piezo-composite transducer. 2. The system of claim 1, wherein: a first layer of the first electrode is a gold (Au) electrode; anda second layer of the first electrode is formed of a plurality of silver nanowires (AgNW) and the polydimethylsiloxane (PDMS). 3. The system of claim 1, wherein: a height of at least a portion of the plurality of 1-3 composite pillars is approximately 1000 μm;a thickness of the first electrode is approximately 100 nm; anda thickness of the second electrode is approximately 50 μm. 4. The system of claim 1, wherein the flexible 1-3 piezo-composite transducer is implemented in a pressure sensor, an ultrasound device, a hydrophone, an accelerometer, a medical imaging device, a brain stimulator, or a nondestructive testing (NDT) probe. 5. A flexible piezo-composite transducer, comprising: a plurality of composite pillars extending upwardly from a transducer substrate, individual ones of the plurality of composite pillars formed of an active piezo-electric material; anda passive polymer matrix formed of a flexible material positioned between the plurality of composite pillars. 6. The flexible piezo-composite transducer of claim 5, wherein the active piezoelectric material comprises one of: a lead zirconate titanate (PZT) ceramic and a piezo-electric single crystal. 7. The flexible piezo-composite transducer of claim 6, wherein the active piezoelectric material comprises the piezo-electric single crystal, the piezo-electric single crystal being PMN-PT single crystal or PZN-PT single crystal. 8. The flexible piezo-composite transducer of claim 6, wherein the active piezoelectric material comprises the PZT ceramic and the PZT ceramic is one of: PZT-5H, PZT-5A, and PZT-5J. 9. The flexible piezo-composite transducer of claim 5, wherein the flexible material of the passive polymer matrix comprises polydimethylsiloxane (PDMS). 10. The flexible piezo-composite transducer of claim 5, further comprising: a first electrode and a second electrode positioned on each side of the flexible piezo-composite transducer;wherein a first layer of the first electrode is positioned on each side of a layer formed of the plurality of composite pillars and the passive polymer matrix; andwherein a second layer of the first electrode is positioned on each side of the layer formed of the plurality of composite pillars and the passive polymer matrix. 11. The flexible piezo-composite transducer of claim 10, wherein: the first layer of the first electrode comprises a Ti/Au electrode or a Cr/Au electrode; andthe second layer of the first electrode comprises a silver nanowire (AgNW) and a PDMS electrode. 12. The flexible piezo-composite transducer of claim 1, wherein the flexible piezo-composite transducer is implemented in a pressure sensor, an ultrasound device, a hydrophone, an accelerometer, a medical imaging device, a brain stimulator, or a nondestructive testing (NDT) probe. 13. A method for forming a flexible piezo-composite transducer, comprising: bonding an active piezoelectric material to a substrate;dicing the active piezoelectric material using a dicing saw to form a plurality of composite pillars;filling a plurality of trenches of the plurality of composite pillars as diced with liquid polydimethylsiloxane (PDMS);de-bonding the substrate from the active piezoelectric material as filled;depositing a first electrode on at least one side of the active piezoelectric material as filled;applying a direct current (DC) or an alternate current (AC) poling; anddepositing a second electrode on the at least one side of the active piezoelectric material as filled. 14. The method of claim 13, further comprising: processing the active piezoelectric material as diced using an oxygen plasma method prior to filling the plurality of trenches of the plurality of composite pillars as diced with the liquid polydimethylsiloxane (PDMS). 15. The method of claim 13, wherein the active piezoelectric material comprises a lead zirconate titanate (PZT) ceramic, a PMN-PT single crystal material, a PZN-PT single crystal material, or a piezoelectric single crystal material. 16. The method of claim 15, wherein: the PZT ceramic comprises at least one of: PZT-5H, PZT-5A, and other PZT ceramic; orthe piezoelectric single crystal comprises at least one of: quartz and lithium niobate. 17. The method of claim 13, wherein: the first electrode comprises a Ti/Au electrode or a Cr/Au electrode;the second electrode comprises a silver nanowire (AgNw) and PDMS electrode; andthe active piezoelectric material is bonded to the substrate using wax, wherein the substrate comprises a silicon wafer. 18. The method of claim 13, wherein the liquid PDMS comprises a weight ratio of base to curing agent of 10:1. 19. The method of claim 13, wherein the plurality of trenches are filled with the liquid PDMS using a spin coating technique at approximately 2000 rpm for about 2 min. 20. The method of claim 13, wherein the DC poling is applied with 2 kV/mm at 100° C. for 30 min for piezoelectric ceramics.
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