[특허]Transport system for semiconductor wafer multiprocessing station system

[미국특허] Transport system for semiconductor wafer multiprocessing station system 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65G-051/02
출원번호	US-0618654 (1975-10-01)
발명자 / 주소	Babinski John Paul (Essex Junction VT) Bertelsen Bruce Irving (Essex Junction VT) Raacke Karl Heinz (Essex Junction VT) Sirgo Valdeko Harry (Colchester VT) Townsend Clarence Jay (Essex Junction VT)
출원인 / 주소	International Business Machines Corporation (Armonk NY 02)
인용정보	피인용 횟수 : 72 인용 특허 : 0

초록 ▼

The teaching discloses a dual bidirectional minimum volume self-centering air tract system for transporting semiconductor wafers or geometrically similar parts-in-process to and from processing tool stations in a random type manner and embodying controls to identify and collect treated wafers in segregated lots. The enclosed system is at a positive pressure to avoid ambient contamination. The enclosed track system further embodies a device for the combined computerized control of individual wafer routing in the system, humidity, temperature, and particulate content of the fluid within and utilized by the transport system while supplying and receiving wafers to processing tool stations which may have a wide variation of ambient conditions. Further the transport system embodies among other features a device for bidirectional travel with cross over intersections, directional control means, buffer sections and a fluid vector from a lower plenum for maintaining wafers centered on a fluidic cushion track so as to avoid edge contact of the wafer against any part of the apparatus and minimal backside or back flat face contact with the track membrane. The system also provides a device for sending wafers into the system and collecting processed pieces in suitable containers in lot or random form.

대표청구항 ▼

A minimum volume enclosed semiconductor self-centering fluidic dual lane unidirectional transport system comprising the following interacting elements, a means for supplying a vectorized fluid cushion onto a transport surface and associated with, a means for circulating and filtering said fluid used as a transport means and coupled with, a means for adding make up fluid to the system in order to maintain a relatively constant volume pressure of fluid in said system and, having an interacting means for providing vacuum ports at specific system locations whereby vacuum eminating therefrom aids in the control of transport of work pieces for directing, and routing work pieces with, a means for cross over bidirectional intersections connected to, a means for entering and exiting work pieces to and from said system and associated with, a means for a storage hold up buffer connected to said system, and a means for work piece directional turn around with, a means for connecting said system with a multiplicity of processing units, and a means for providing the system with connected modular sections coupled with, a means for automatically controlling the transport of work pieces to and from processing unit stations and exit and inlet said work pieces to and from said system, and a means for fail safe interconnection of fluid and vacuum supply to said system connected to, a holding buffer and by pass directional turn around means juxtapostional to the entrance of each processing unit connected to said system.

이 특허를 인용한 특허 (72) 인용/피인용 타임라인 분석

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Transport system for semiconductor wafer multiprocessing station system 원문보기

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[미국특허] Transport system for semiconductor wafer multiprocessing station system 원문보기

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