[특허]Vacuum sputtering apparatus

Vacuum sputtering apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C23C-015/00 C23C-013/08
출원번호	US-0556584 (1975-03-10)
발명자 / 주소	Rosvold Warren C. (Sunnyvale CA)
출원인 / 주소	Signetics Corporation (Sunnyvale CA 02)
인용정보	피인용 횟수 : 75 인용 특허 : 0

초록 ▼

Vacuum sputtering apparatus for treating articles having a housing forming a main vacuum chamber with a plurality of work stations therein. A lock chamber is provided in the main vacuum chamber through which articles can be inserted and removed. Means is provided in the main vacuum chamber for advancing the articles sequentially through the work stations in the main chamber so that as articles are being removed from the lock chambers, articles which have passed through the work stations can be removed from the main vacuum chamber through the lock chamber. In the method articles are introduced into the main vacuum chamber through a lock chamber, and they are intermittently progressively advanced through a plurality of work stations in the main vacuum chamber and then are removed through the lock chamber.

대표청구항 ▼

In a vacuum sputtering apparatus for treating articles, a housing forming a main vacuum chamber having a plurality of work stations therein, at least one sputtering apparatus mounted in at least one of the work stations, means connected to the vacuum chamber for forming a vacuum in the vacuum chamber, said housing having a wall with an opening formed therein through which the articles can be inserted and removed from the main vacuum chamber, first and second sealing members for forming sealing engagement with opposite sides of the wall and forming in combination with the wall a lock chamber, means connected into the lock chamber to create a vacuum in the lock chamber, means for moving the first sealing member into and out of engagement with said wall whereby articles may be inserted into and removed from said chamber, means for moving said second sealing member into and out of engagement with said wall whereby when said sealing member is out of engagement with said wall, articles which have been inserted into the lock chamber can be removed, and means in the main chamber for intermittently advancing articles from the lock chamber and moving the same progressively through the work stations in the main vacuum chamber and thence back into the lock chamber whereby articles can be inserted into the lock chamber, removed therefrom and advanced progressively through the work stations and thereafter inserted in the lock chamber for removal therefrom.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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Vacuum sputtering apparatus 원문보기

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이 특허를 인용한 특허 (75)

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