$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Workpiece handling system for vacuum processing 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-013/08
출원번호 US-0624498 (1975-10-21)
발명자 / 주소
  • Dorenbos Frederick William (El Cerrito CA)
출원인 / 주소
  • Airco, Inc. (Montvale NJ 02)
인용정보 피인용 횟수 : 66  인용 특허 : 0

초록 ▼

Apparatus and method are disclosed for transporting discrete workpieces between the outside and inside of a pressure sealable chamber, such as a chamber under vacuum. At least one pressure lock is attached to the chamber and separated therefrom by a gate valve. The lock includes a door with associat

대표청구항 ▼

Apparatus for transporting at least one workpiece between the outside and the inside of a pressure sealable chamber, comprising: a. a pressure sealable lock connected to the chamber having a gate aperture through which the workpiece is transportable between the inside of the chamber and the lock, an

이 특허를 인용한 특허 (66)

  1. Norman Kerry J. ; Baxter Brian L. ; Fowler Kenneth D. ; Sagers Daren L. ; Hill Michael J. ; England Jeffery P., Airbag inflator x-ray inspection apparatus with rotating entry and exit doors.
    상세보기
  2. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Apparatus for automated cassette handling.
    상세보기
  3. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Apparatus for automated cassette handling.
    상세보기
  4. Gelinas William A. (Hadley MA) Holtz Edwin R. (Enfield CT) Argazzi Dennis J. (Deep River CT) Smigel Robert L. (Higganum CT) Wiley Dan W. (Bristol CT), Apparatus for producing an atmosphere other than ambient.
    상세보기
  5. Welty Richard P. (Boulder CO), Apparatus for producing graded-composition coatings.
    상세보기
  6. Uehara Akira (Yokohama JPX) Nakane Hisashi (Kawasaki JPX), Apparatus for the treatment of a wafer by plasma reaction.
    상세보기
  7. Zejda Jaroslav (Rodenbach DEX), Apparatus for transporting discoidal substrates in a vacuum coating apparatus.
    상세보기
  8. Hwang, Chul-Joo; Kim, Yong-Jin, Apparatus having conveyor and method of transferring substrate using the same.
    상세보기
  9. Beer, Emanuel; White, John M., Automated substrate processing system.
    상세보기
  10. Nakayama Satoshi (Isehara JPX) Takeuchi Hideaki (Isehara JPX) Murota Junichi (Isehara JPX) Hurukado Tatuhiko (Hachioji JPX) Takeda Shigeru (Hamura JPX) Suzuki Masuo (Fussa JPX) Kurokawa Harushige (Hi, Chemical vapor deposition apparatus.
    상세보기
  11. Matsushita Yoshinari (Hirakata JPX) Fukumoto Kenji (Hirakata JPX), Chemical vapor deposition reaction apparatus having isolated reaction and buffer chambers.
    상세보기
  12. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
    상세보기
  13. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
    상세보기
  14. Marohl Dan, Compact apparatus and method for storing and loading semiconductor wafer carriers.
    상세보기
  15. Tepman Avi, Consecutive deposition system.
    상세보기
  16. Hanak Joseph J. (Lawrenceville NJ), Continuous in-line deposition system.
    상세보기
  17. Olson Roger Allen ; Kopitzke ; III Frederick William ; O'Connor Joseph Patrick, Continuous vapor deposition apparatus.
    상세보기
  18. Lee,Jae Chull; Berkstresser,David, Curved slit valve door with flexible coupling.
    상세보기
  19. Lee, Jae-Chull; Kurita, Shinichi; White, John M.; Anwar, Suhail, Decoupled chamber body.
    상세보기
  20. Kiss Zoltan (Belle Mead NJ), Deposition of materials.
    상세보기
  21. Saint Martin Bernard,FRX ; Prioult nee Lipp Christiane,FRX, Device for joining and sealing together two enclosures isolated from an external environment.
    상세보기
  22. Kurita, Shinichi; Blonigan, Wendell T., Double dual slot load lock chamber.
    상세보기
  23. Kurita, Shinichi; Blonigan, Wendell T.; Hosokawa, Akihiro, Dual substrate loadlock process equipment.
    상세보기
  24. Kurita, Shinichi; Blonigan, Wendell T.; Hosokawa, Akihiro, Dual substrate loadlock process equipment.
    상세보기
  25. Bachrach Robert Z., Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers.
    상세보기
  26. Koguchi, Toshiaki; Watanabe, Kazuhito; Takahashi, Nobuyuki, Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus.
    상세보기
  27. Koguchi,Toshiaki; Watanabe,Kazuhito; Takahashi,Nobuyuki, Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus.
    상세보기
  28. Shah, Vinay; Runstadler, Jr., William; Fairbairn, Kevin P.; Bluck, Terry; Cooke, Richard Henry, High throughput load lock for solar wafers.
    상세보기
  29. Kurita Shinichi ; White John M., In-situ substrate transfer shuttle.
    상세보기
  30. Bouchaib Pierre (L\Etang la Ville FRX), Installation for treatment of materials for the production of semi-conductors.
    상세보기
  31. Davis Cecil J. (Greenville TX) Matthews Robert (Plano TX) Bowling Robert A. (Garland TX), Integrated circuit processing system.
    상세보기
  32. Tullis Barclay J. (Palo Alto CA) ..AP: Hewlett-Packard Company (Palo Alto CA 02), Interlocking door latch for dockable interface for integrated circuit processing.
    상세보기
  33. Kurita, Shinichi; Blonigan, Wendell T.; Tanase, Yoshiaki, Large area substrate transferring method for aligning with horizontal actuation of lever arm.
    상세보기
  34. Kurita,Shinichi; Blonigan,Wendell T.; Tanase,Yoshiaki, Load lock chamber for large area substrate processing system.
    상세보기
  35. Kurita,Shinichi; Blonigan,Wendell T., Load lock chamber having two dual slot regions.
    상세보기
  36. Lee, Jae-Chull; Anwar, Suhail; Kurita, Shinichi, Load lock chamber with decoupled slit valve door seal compartment.
    상세보기
  37. Cann Gordon L. (17751-F Sky Park East Irvine CA 92714), Magnetoplasmadynamic processor, applications thereof and methods.
    상세보기
  38. White John M. ; Blonigan Wendell T. ; Tiner Robin L. ; Kurita Shinichi, Method and apparatus for substrate transfer and processing.
    상세보기
  39. Tomisawa Yoshiaki (Hitachi JPX) Satou Tadaji (Hitachi JPX) Hayashi Nobuyuki (Hitachi JPX) Miyamae Yusuke (Hitachi JPX), Method employing input and output staging chamber devices for reduced pressure lamination.
    상세보기
  40. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Method for automated cassette handling.
    상세보기
  41. Awal Muhammad A. (Trenton NJ) Lee El Hang (East Brunswick NJ), Method for heteroepitaxial growth using multiple MBE chambers.
    상세보기
  42. Kurita,Shinichi; Blonigan,Wendell T., Method for transferring substrates in a load lock chamber.
    상세보기
  43. White John M. ; Conner Robert B. ; Law Kam S. ; Turner Norman L. ; Lee William T. ; Kurita Shinichi, Modular substrate processing system.
    상세보기
  44. John M. White ; Wendell T. Blonigan ; Michael W. Richter, Multi-function chamber for a substrate processing system.
    상세보기
  45. White John M. ; Blonigan Wendell T. ; Richter Michael W., Multi-function chamber for a substrate processing system.
    상세보기
  46. White John M. ; Blonigan Wendell T. ; Richter Michael W., Multi-function chamber for a substrate processing system.
    상세보기
  47. Moore, Robert B.; Ruhland, Eric; Sundar, Satish; Silvetti, Mario David, Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same.
    상세보기
  48. Kurita, Shinichi; Anwar, Suhail; Lee, Jae-Chull, Multiple slot load lock chamber and method of operation.
    상세보기
  49. Tullis Barclay J. (Palo Alto CA) Parikh Mihir (San Jose CA) Thrasher David L. (Menlo Park CA) Johnston Mark E. (Saratoga CA), Particle-free dockable interface for integrated circuit processing.
    상세보기
  50. , Particle-free dockable interface for integrated circuit processing.
    상세보기
  51. Yano Kensaku (Kanagawa JPX) Furukawa Akihiko (Tokyo JPX) Miyagawa Ryohei (Kanagawa JPX) Iida Yoshinori (Tokyo JPX), Photo chemical reaction apparatus.
    상세보기
  52. Takahashi Nobuyuki (Fuchu JPX), Processing apparatus comprising a cassette member temporarily swingable to vertically hold a plurality of substrates.
    상세보기
  53. Ohtaka Tadashi (Katsuta JPX), Specimen-exchanging apparatus.
    상세보기
  54. White, John M.; Turner, Norman L.; Tiner, Robin L.; Keller, Ernst; Kurita, Shinichi; Blonigan, Wendell T.; Berkstresser, David E., Substrate transfer shuttle.
    상세보기
  55. White, John M.; Turner, Norman L.; Tiner, Robin L.; Keller, Ernst; Kurita, Shinichi; Blonigan, Wendell T.; Berkstresser, David E., Substrate transfer shuttle.
    상세보기
  56. Blonigan Wendell T. ; White John M., Substrate transfer shuttle having a magnetic drive.
    상세보기
  57. Blonigan, Wendell T.; White, John M., Substrate transfer shuttle having a magnetic drive.
    상세보기
  58. Wendell T. Blonigan ; John M. White, Substrate transfer shuttle having a magnetic drive.
    상세보기
  59. Ranger Martial (Gloucester CAX), Vacuum coating vessel with movable shutter plate.
    상세보기
  60. Kim, Sam Hyungsam; Lee, Jae-Chull; Sterling, William N.; Brown, Paul, Valve door with ball coupling.
    상세보기
  61. Coad George L. (Lafayette CA) Hutchinson Martin A. (Santa Clara CA) Shaw R. Howard (Palo Alto CA), Wafer coating system.
    상세보기
  62. Turner Frederick T. (Sunnyvale CA) Hutchinson Martin A. (Santa Clara CA) Shaw R. H. (Palo Alto CA) Lamont ; Jr. Lawrence T. (Mountain View CA), Wafer coating system.
    상세보기
  63. Purser, Kenneth H., Wafer holding apparatus for ion implantation.
    상세보기
  64. Dimock Jack A. (Santa Barbara CA) Woestenburg Dirk P. (Summerland CA), Wafer processing machine with evacuated wafer transporting and storage system.
    상세보기
  65. Hertel Richard J. (Bradford MA), Wafer transfer system.
    상세보기
  66. Corville Richard E. (Alameda CA), Workpiece accumulating and transporting apparatus.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로