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Transducer assembly for megasonic cleaning 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/10
출원번호 US-0800276 (1977-05-25)
발명자 / 주소
  • Shwartzman
  • Stanley
  • Mayer
  • Alfred
출원인 / 주소
  • RCA Corporation
대리인 / 주소
    Christoffersen, H.Magee, T. H.
인용정보 피인용 횟수 : 72  인용 특허 : 0

초록

A transducer assembly adapted to oscillate at an ultrasonic frequency comprises a metallic foil having a back surface, at least one transducer having one face thereof mounted adjacent to the back surface by conductive means disposed therebetween, and insulating means disposed in the area adjacent to

대표청구항

대표청구항이 없습니다.

이 특허를 인용한 특허 (72)

  1. Kennedy, III, Thomas J.; Lipkens, Bart; Masi, Louis; Kowalski, Stanley; Leidel, Chris, Acoustic bioreactor processes.
  2. Lipkens, Bart; Ross-Johnsrud, Benjamin; Zabolotskaya, Evgenia; Ilinskii, Yuril, Acoustic manipulation of particles in standing wave fields.
  3. Gilmanshin, Rudolf; Lipkens, Bart, Acoustic methods for separation of cells and pathogens.
  4. Lipkens, Bart; Gilmanshin, Rudolf; Masi, Louis; Ross-Johnsrud, Benjamin; Miller, Erik; Presz, Jr., Walter M.; Kennedy, III, Thomas J., Acoustic perfusion devices.
  5. Lipkens, Bart; Gilmanshin, Rudolf; Ross-Johnsrud, Ben; Chitale, Kedar, Acoustic separation of cellular supporting materials from cultured cells.
  6. Lipkens, Bart; Presz, Walter M.; Chitale, Kedar; Kennedy, III, Thomas J.; Ross-Johnsrud, Ben, Acoustophoretic device for angled wave particle deflection.
  7. Lipkens, Bart; Dionne, Jason, Acoustophoretic device with piezoelectric transducer array.
  8. Lipkens, Bart; Dionne, Jason; Presz, Jr., Walter M.; Kennedy, III, Thomas J., Acoustophoretic separation technology using multi-dimensional standing waves.
  9. Puskas William L., Apparatus and methods for cleaning and/or processing delicate parts.
  10. Puskas William L., Apparatus and methods for cleaning and/or processing delicate parts.
  11. Puskas William L., Apparatus and methods for cleaning and/or processing delicate parts.
  12. Puskas, William L., Apparatus and methods for cleaning and/or processing delicate parts.
  13. Puskas, William L., Apparatus and methods for cleaning and/or processing delicate parts.
  14. William L. Puskas, Apparatus and methods for cleaning and/or processing delicate parts.
  15. Hahn, Christopher; Lee, Hanjoo, Apparatus for ejecting fluid onto a substrate and system and method incorporating the same.
  16. Puskas, William L., Apparatus, circuitry and methods for cleaning and/or processing with sound waves.
  17. Puskas,William L., Apparatus, circuitry, signals and methods for cleaning and/or processing with sound.
  18. Puskas, William L., Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound.
  19. Puskas,William L., Apparatus, circuitry, signals, probes and methods for cleaning and/or processing with sound.
  20. Lipkens, Bart; Masi, Louis; Kowalski, III, Stanley; Presz, Jr., Walter M.; Dionne, Jason; Dutra, Brian; Mercado, Ari; Kennedy, III, Thomas J.; Martin, Arthur, Bioreactor using acoustic standing waves.
  21. Lipkens, Bart; Masi, Louis; Kowalski, III, Stanley; Presz, Jr., Walter M.; Dionne, Jason; Dutra, Brian; Mercado, Ari; Kennedy, III, Thomas J.; Martin, Arthur, Bioreactor using acoustic standing waves.
  22. Lipkens, Bart; Masi, Louis; Kowalski, III, Stanley; Presz, Jr., Walter M.; Dionne, Jason; Dutra, Brian; Mercado, Ari; Kennedy, III, Thomas J.; Martin, Arthur; Rozembersky, John, Bioreactor using acoustic standing waves.
  23. Beck Mark J. ; Vennerbeck Richard B., Chemically inert megasonic transducer system.
  24. Bran Mario E. (Garden Grove CA), Cleaning apparatus.
  25. Anderson,Tom; Boyd,John M., Distribution of energy in a high frequency resonating wafer processing system.
  26. Lipkens, Bart; Musiak, Ronald; Mealey, Dane; Shajii, Ali, Electronic configuration and control for acoustic standing wave generation.
  27. Brisken Axel F. (Ballston Lake NY) Smith Lowell S. (Schenectady NY), Fabrication of front surface matched ultrasonic transducer array.
  28. Chu Hsien-Jue ; Chavez Lloyd ; Acree William M. ; Chang Lucille W. S., Feline vaccine compositions and method for preventing chlamydia infections or diseases using the same.
  29. Rice Roy W. (Alexandria VA) Pohanka Robert C. (Springfield VA), Flexible, shapeable, composite acoustic transducer.
  30. Moxness Sherman U. (Golden Valley MN) Grant Robert W. (Excelsior MN), High frequency sonic substrate processing module.
  31. Hammond Peter (Rochester NY) Schumacher Kevin S. (North Caldwell NY), High frequency ultrasonic system.
  32. Gross, David J.; Arguelles, David, High power density ultrasonic fuel cleaning with planar transducers.
  33. Vennerbeck Richard B., High power megasonic transducer.
  34. Dionne, Jason; Lipkens, Bart; Rietman, Edward, High-volume fast separation of multi-phase components in fluid suspensions.
  35. Beck, Mark J.; Vennerbeck, Richard B., Indium or tin bonded megasonic transducer systems.
  36. Lipkens, Bart; Presz, Jr., Walter M.; King, Jeffrey; Barnes, Jason; Mealey, Dane; McCarthy, Brian; Ross-Johnsrud, Ben; Chitale, Kedar, Large scale acoustic separation device.
  37. Bran Mario E. (11435 Homeway Dr. Garden Grove CA 92641), Megasonic cleaning apparatus.
  38. Bran Mario E. (Garden Grove CA), Megasonic cleaning apparatus.
  39. Shwartzman, Stanley, Megasonic cleaning apparatus and method.
  40. Bran Mario E. (Garden Grove CA), Megasonic cleaning method.
  41. Reynolds H. Vincent, Megasonic plating system.
  42. Yin, Yaobo; Jiang, Linda (Tong), Megasonic precision cleaning of semiconductor process equipment components and parts.
  43. Goodson, J. Michael, Megasonic processing apparatus with frequency sweeping of thickness mode transducers.
  44. Goodson, J. Michael, Megasonic processing apparatus with frequency sweeping of thickness mode transducers.
  45. Boyd,John M.; Redeker,Fred C.; Treur,Randolph E.; Thie,William, Method and apparatus for megasonic cleaning with reflected acoustic waves.
  46. Redeker,Fred C.; Boyd,John M.; Parks,John, Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluid.
  47. Bran, Mario E., Method for megasonic processing of an article.
  48. Bran, Mario E., Method of manufacturing integrated circuit devices.
  49. Presz, Jr., Walter M.; Chitale, Kedar; Lipkens, Bart, Methods and apparatus for particle aggregation using acoustic standing waves.
  50. Puskas,William, Multi-generator system for an ultrasonic processing tank.
  51. Lipkens, Bart; Kennedy, III, Thomas J.; King, Jeffrey; Barnes, Jason; McCarthy, Brian; Mealey, Dane; Miller, Erik; Presz, Jr., Walter M.; Ross-Johnsrud, Benjamin; Rozembersky, John, Multi-stage acoustophoresis device.
  52. Puskas William L., Multiple frequency cleaning system.
  53. Puskas, William L., Multiple frequency cleaning system.
  54. Beck, Mark J.; Vennerbeck, Richard B., One-piece cleaning tank with indium bonded megasonic transducer.
  55. Malcolm R. Schuler ; Robert F. Longenberger ; Rodney S. Ridley ; Thomas E. Grebs ; Jason R. Trost ; Raymond J. Webb ; Michael A. Caravaggio ; Terry L. Fenstermacher, Potted transducer array with matching network in a multiple pass configuration.
  56. Schuler Malcolm R. ; Longenberger Robert F. ; Ridley Rodney S. ; Grebs Thomas E. ; Trost Jason R. ; Webb Raymond J. ; Caravaggio Michael A. ; Fenstermacher Terry L., Potted transducer array with matching network in a multiple pass configuration.
  57. Puskas William L., Power system for impressing AC voltage across a capacitive element.
  58. Puskas,William L., Probe system for ultrasonic processing tank.
  59. Lynnworth Lawrence C. (Waltham MA) Fowler Kenneth A. (Medfield MA) Patch Dana R. (Medfield MA), Sealed, matched piezoelectric transducer.
  60. Lipkens, Bart; Dionne, Jason; Mercado, Ari; Dutra, Brian; Presz, Jr., Walter M.; Kennedy, III, Thomas J.; Masi, Louis, Separation of multi-component fluid through ultrasonic acoustophoresis.
  61. Malcolm R. Schuler ; Rodney S. Ridley ; Thomas E. Grebs, Simplified ozonator for a semiconductor wafer cleaner.
  62. Lipkens, Bart; Dionne, Jason; Ghoshal, Goutam, System for generating high concentration factors for low cell density suspensions.
  63. Bran, Mario E., System for megasonic processing of an article.
  64. Puskas William L., Systems and methods for ultrasonically processing delicate parts.
  65. Pedziwiatr Michael P. ; Pedziwiatr Edward A., Ultrasonic cleaning apparatus.
  66. Pedziwiatr Michael P. ; Pedziwiatr Edward A., Ultrasonic cleaning method in which ultrasonic energy of different frequencies is utilized simultaneously.
  67. Goodson,J. Michael, Ultrasonic processing method and apparatus with multiple frequency transducers.
  68. Abts Leigh R. (Providence RI), Ultrasonic sensing.
  69. Hossack James M. (Redmond WA), Ultrasonic transducer component and process for making the same and assembly.
  70. Buisker Raymond A. ; Kalnajs Andrew, Ultrasonic transducer units for web detection and the like.
  71. Puskas William L., Ultrasonic transducer with bias bolt compression bolt.
  72. Puskas William L., Ultrasonic transducer with epoxy compression elements.
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