[특허]Vacuum-sealed gas-bearing assembly

[미국특허] Vacuum-sealed gas-bearing assembly 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B01J-017/00 B16J-015/40
출원번호	US-0039307 (1979-05-15)
발명자 / 주소	Fox deceased Wayne L. (5640 Cold Water Dr. late of Castro Valley CA) Fox executrix by Rosemary M. (5640 Cold Water Dr. Castro Valley CA 94546)
인용정보	피인용 횟수 : 49 인용 특허 : 2

초록 ▼

An integral vacuum-sealed gas-bearing assembly comprising a combination of gas-bearing elements and vacuum plenums such that a gas seal is maintained across the bearing separating two assemblies to allow one assembly to be moved relative to the other in finite increments while maintaining an interna

대표청구항 ▼

An integral vacuum sealed gas-bearing housing assembly comprising, in combination: a first sub-assembly housing means establishing a first internal chamber, said first sub-assembly having a first planar surface about the periphery of said first chamber and a plurality of vacuum plenums delineated by adjacent lands and extending to said planar surface; a plurality of individual plenum ducts connected to said plenums; manifold means for interconnecting said plenum ducts to vacuum pump means; at least one gas-bearing means within said first sub-assembly about said first planar surface and extending about the perimeter of the chamber and spaced laterally from said plenums; at least one gas duct within the side wall of said first housing and interconnected to the gas-bearing means; manifold means for interconnecting the gas duct to a gas pump means to pump gas therein at a pressure above atmospheric pressure; a second sub-assembly housing means forming a second internal chamber communicating with said first internal chamber, said second sub-assembly housing means having a second planar surface, said second planar surface being in face-to-face orientation with said first planar surface and overlapping said individual plenums and said gas-bearing groove; and driver means for moving said second sub-assembly housing means relative to said first sub-assembly housing means whereby gas pumped within said gas duct establishes a gas bearing about the interface of said first and second planar surfaces to establish a spacing intermediate the first and second sub-assemblies and said vacuum pump means removes gas from said interface intermediate the gas-bearing means and said internal chambers.

이 특허에 인용된 특허 (2) 인용/피인용 타임라인 분석

Hart Lewis F. (Bridgewater NJ), Apparatus and method for aligning wafers.
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이 특허를 인용한 특허 (49) 인용/피인용 타임라인 분석

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Sogard Michael R. ; Spicer Denis F.,GBX, Air bearing operable in a vacuum region.
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Petric, Paul F.; Foley, Michael S.; Waz, John J.; Milgate, III, Robert W., Apparatus for positioning a workpiece in a localized vacuum processing system.
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Kice, Timothy F.; Schellenger, Jeffrey W.; Kattenberg, John T., Bearing assembly with outboard bearing support cartridge.
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Kattenberg, John T., Bearing assembly with spacer for locating a seal sleeve.
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Krivts, Igor; Kotik, Eyal; Pinhasi, Eitan; Cafri, Hagay, Chamber elements defining a movable internal chamber.
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Carter Donald L. (Vestal NY), Combination rotary gas bearing and seal apparatus.
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Hipol Philip J. ; Hill David R., Diaphragm preload air bearing.
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Shinozaki,Hiroyuki, Differential pumping seal apparatus.
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Lewis ; Jr. George C. (Sudbury MA) Vanslette Robert A. (Medfield MA), Electron beam lithographic apparatus.
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Lamattina John R. (Wakefield MA) Petric Paul F. (Swampscott MA), Envelope apparatus for localized vacuum processing.
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Maier Eduard A. (Munich DEX), Flange seal.
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Michael R. Sogard, Fluid bearing operable in a vacuum region.
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Sogard Michael R., Fluid bearing operable in a vacuum region.
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Petric Paul F. (Swampscott MA) Foley Michael S. (Beverly MA) Utlaut Mark W. (Beverly MA) Laiacano Joseph A. (Gloucester MA), Gap control system for localized vacuum processing.
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Bisschops, Theodorus H. J.; Vijfvinkel, Jakob; Soemers, Hermanus M. J. R.; Driessen, Johannes C.; Renkens, Michael J. M.; Bouwer, Adrianus G., Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus.
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Bisschops, Theodorus H. J.; Vijfvinkel, Jakob; Soemers, Hermanus M. J. R.; Driessen, Johannes C.; Renkens, Michael J. M.; Bouwer, Adrianus G., Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses.
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Kosmowski Wojciech B., High speed drilling spindle with reciprocating ceramic shaft and edoubl-gripping centrifugal chuck.
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Kosmowski Wojciech B., High speed drilling spindle with reciprocating shaft and double-gripping centrifugal chuck.
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Tucker Theodore W. (Lincoln MA), High vacuum compatible air bearing stage.
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Funabashi Takanori (Hirakata JPX) Nakada Akiyoshi (Suita JPX) Tada Haruo (Kobe JPX), Industrial robot.
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Geoffrey Ryding ; Theodore H. Smick ; Marvin Farley ; Takao Sakase, Ion extraction assembly.
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Geoffrey Ryding, Ion implanter with vacuum piston counterbalance.
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Katsuhito Nishikawa ; Thomas F. Carlos, Linear robot.
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Schneider, Ronald Maarten; Vijfvinkel, Jakob, Lithographic apparatus and device manufacturing method.
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Petric Paul F. (Swampscott MA) Foley Michael S. (Beverly MA), Localized vacuum processing apparatus.
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Stover Richard W. (Chester VA) Proper Frederick T. (Chester VA) Young Steven A. (Cary NC), Melt pump seal with vacuum housing.
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Smick Theodore H. ; Ryding Geoffrey ; Farley Marvin, Method and apparatus for controlling a workpiece in a vacuum chamber.
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Smick Theodore H. ; Ryding Geoffrey ; Farley Marvin, Method and apparatus for controlling a workpiece in a vacuum chamber.
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Theodore H. Smick ; Geoffrey Ryding ; Marvin Farley, Method and apparatus for controlling a workpiece in a vacuum chamber.
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Tsuda, Takuma; Shinohara, Shinji; Tokushima, Shinobu; Okubo, Yukiharu; Shimoda, Toshimasa; Watson, Douglas C.; Novak, W. Thomas, Method of making a static pressure air bearing.
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Bisschops, Theodorus H. J.; Vijfvinkel, Jakob; Soemers, Hermanus M. J. R.; Driessen, Johannes C.; Renkens, Michael J. M.; Bouwer, Adrianus G., Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses.
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Theodorus H. J. Bisschops NL; Jakob Vijfvinkel NL; Hermanus M. J. R. Soemers NL; Johannes C. Driessen NL; Michael J. M. Renkens NL; Adrianus G. Bouwer NL, Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses.
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Bisschops, Theodorus H. J.; Soemers, Hermanus M. J. R.; Vijfvinkel, Jakob; Driessen, Johannes C.; Renkens, Michael J. M.; Bouwer, Adrianus G., Movable support in a vacuum chamber and its application in lithographic projection apparatuses.
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Devitt,Andrew J., Moving vacuum chamber stage with air bearing and differentially pumped grooves.
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Katsuhito Nishikawa ; Thomas F. Carlos, Particulate free air bearing and seal.
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Nakamura,Tsuyoshi; Saji,Nobuhito, Positioning apparatus.
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Logan Clinton M. (Pleasanton CA) Garibaldi Jack L. (Livermore CA), Rotatable seal assembly.
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Rice, Michael R.; Schlimoff, Natan; Krivts (Krayvitz), Igor; Avneri, Israel; Uziel, Yoram; Admoni, Erez; Reuter, Paul; Weaver, William (Ty), Slit valve with a pressurized gas bearing.
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Burke John A. (Rocky River OH) Gross James B. (Lansdale PA), Spring seal.
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Shinozaki,Hiroyuki; Sobukawa,Hirosi; Yoshikawa,Shoji, Stage device and angle detecting device.
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Tokushima Shinobu,JPX ; Okubo Yukiharu,JPX ; Shimoda Toshimasa,JPX, Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatus.
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Takuma Tsuda JP; Shinji Shinohara JP; Shinobu Tokushima JP; Yukiharu Okubo JP; Toshimasa Shimoda JP; Douglas C. Watson ; W. Thomas Novak, Static pressure air bearing.
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Rice, Michael R.; Reuter, Paul; Weaver, William (Ty); Morey, Travis; Schlimoff, Natan; Krivts (Krayvitz), Igor; Avneri, Israel; Uziel, Yoram; Admoni, Erez, System and method for forming a sealed chamber.
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Ryding, Geoffrey; Smick, Theodore H.; Farley, Marvin; Sakase, Takao, Vacuum bearing structure and a method of supporting a movable member.
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Carter, Donald L., Vacuum-to-vacuum entry system apparatus.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Vacuum-sealed gas-bearing assembly 원문보기