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Laser induced dissociative chemical gas phase processing of workpieces 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-003/06
출원번호 US-0036828 (1979-05-07)
발명자 / 주소
  • Dension Dean R. (Los Gatos CA) Hartsough Larry D. (Berkeley CA)
출원인 / 주소
  • The Perkin-Elmer Corporation (Norwalk CT 02)
인용정보 피인용 횟수 : 125  인용 특허 : 0

초록 ▼

Method and apparatus for chemical treatment of workpieces is disclosed wherein a workpiece to be processed is exposed to a controlled gaseous atmosphere containing a gaseous constituent to be dissociated by laser radiation to produce a gaseous reactant product for reaction with a surface of the work

대표청구항 ▼

In the method of chemical treatment of workpieces, the steps of: exposing a workpiece to a gaseous atmosphere containing a gaseous constituent which is to be dissociated to produce a gaseous reactive product; us atmosphere containing a gaseous constituent which is to be dissociated to produce a gase

이 특허를 인용한 특허 (125)

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