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Method of etching of surfaces of copper or copper alloys by way of an acidic solution containing an oxidizing agent. After removal of the copper surface, the etching solution is passed for regeneration of the oxidizing agent through an electrolysis cell having an anode and a cathode, with copper bei

Method of etching of surfaces of copper or copper alloys by way of an acidic solution containing an oxidizing agent. After removal of the copper surface, the etching solution is passed for regeneration of the oxidizing agent through an electrolysis cell having an anode and a cathode, with copper being deposited on the cathode. The etching solution is maintained free of chloride ions and contains as the oxidizing agent ferric sulfate in a concentration of up to about 140 g of Fe/1 etching solution, whereby the copper content of the etching solution is adjusted to at least 10 g Cu per liter etching solution, while the current density in the electrolysis cell is maintained at at least 2A/dm2.

대표청구항 ▼

A method of electrochemically processing metallic surfaces of workpieces including particularly etching of copper and copper alloy, in an electrolysis cell having an anode in a compartment thereof and a cathode comprising in combination the steps of: providing in said electrolysis cell an acidic sol

A method of electrochemically processing metallic surfaces of workpieces including particularly etching of copper and copper alloy, in an electrolysis cell having an anode in a compartment thereof and a cathode comprising in combination the steps of: providing in said electrolysis cell an acidic solution containing ferric sulfate as an oxidizing agent at a concentration of maximally 140 g Fe/l etching solution, and also containing at least 10 g Cu/l etching solution; maintaining said solution free of chloride ions and at a current density of at least 2A/dm2 in said electrolysis cell; processing a workpiece by etching a metal surface with said solution so that copper is removed therefrom, resulting in a used etching solution; passing said used etching solution through said electrolysis cell again to regenerate used etching solution including the oxidizing agent thereof; and depositing copper on said cathode of said electrolysis cell, suspending in said etching solution electrically conductive carbon particles added for transfer of electrical charge onto a pertaining surface to be processed for the purpose of regeneration of said used etching solution; and periodically charging suspended carbon particles at said anode of said electrolysis cell.