초록 ▼

A humidity sensor having an extended impedance range extending up to 1012 ohms precludes leakage currents. The sensor is in the form of an insulating substrate having conductive film such as gold applied to a surface thereof. The perimeter of a first film is completely encompassed by but spaced from

A humidity sensor having an extended impedance range extending up to 1012 ohms precludes leakage currents. The sensor is in the form of an insulating substrate having conductive film such as gold applied to a surface thereof. The perimeter of a first film is completely encompassed by but spaced from a second film on the surface of the substrate. A humidity responsive layer of iron oxide is applied over the film layers to bridge the spacing therebetween in a continuous manner. Electrical terminals are connected, respectively, to the two films to provide a readout in terms of humidity.

대표청구항 ▼

A high impedance relative humidity sensing element comprising: a high purity insulating substrate; an inner conductive film on the surface of said substrate to form one terminal of said sensing element; an outer conductive film on the surface of said substrate, the perimeter of said inner film being

A high impedance relative humidity sensing element comprising: a high purity insulating substrate; an inner conductive film on the surface of said substrate to form one terminal of said sensing element; an outer conductive film on the surface of said substrate, the perimeter of said inner film being completely encompassed by but spaced from said outer film, thereby leaving a continuous loop of substrate exposed between said inner and outer films, said outer film forming the second terminal of the element; and, a high impedance humidity responsive film applied to cover said continuous substrate loop and to extend onto said inner and outer conductive films so that said humidity responsive layer forms a continuous loop bridging said spacing in a continuous manner.