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A valve includes a piezoelectric bar mounted as a cantilevered beam. The free end of the bar is mounted for movement toward and away from a valve seat surrounding a control opening. The beam is initially flexed when in the closed position so as to maintain a fluid-tight seal with the seat. Applicati

A valve includes a piezoelectric bar mounted as a cantilevered beam. The free end of the bar is mounted for movement toward and away from a valve seat surrounding a control opening. The beam is initially flexed when in the closed position so as to maintain a fluid-tight seal with the seat. Application of an electrical signal causes the bar to flex further, thereby causing the deflectable beam portion to move away from the valve seat and permitting fluid to flow through the control opening. The beam valve may be designed to provide a substantially constant flow independent of changes in the pressure differential thereacross, and to exert a minimum closing force against a seat to provide a substantially fluidtight seal therewith in the absence of a command signal applied to the bar.

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A valve, comprising: a member having a passageway therethrough and having a marginal end portion arranged to provide a valve seat about one end of said passageway; a piezoelectric beam arranged on the upstream side of said member and having a deflectable portion mounted for movement toward and away

A valve, comprising: a member having a passageway therethrough and having a marginal end portion arranged to provide a valve seat about one end of said passageway; a piezoelectric beam arranged on the upstream side of said member and having a deflectable portion mounted for movement toward and away from said seat, said deflectable portion being selectively movable away from said seat toward an initially commanded position, the magnitude of the pressure differential across said member exerting a closing force which urges said deflectable portion to move away from said commanded position toward said seat, said beam having a spring rate such that said deflectable portion will move further away from said seat as said pressure differential decreases to permit a substantially constant flow of fluid through said passageway over a working range of differential pressure across said valve when said deflectable portion has been moved away from said seat; and control means operatively arranged to supply an electrical signal to said beam for selectively causing said deflectable portion to move away from said seat; whereby the position of said deflectable portion relative to said seat may control a flow of fluid through said passageway.