초록

An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant.

대표청구항 ▼

In a process for producing silicon powder by thermally decomposing silane gas in a heated free-space reaction zone of a decomposition reactor the improvement which comprises (i) introducing a turbulent jet of silane gas into a free-space reaction zone extending a desired length along the central axi

In a process for producing silicon powder by thermally decomposing silane gas in a heated free-space reaction zone of a decomposition reactor the improvement which comprises (i) introducing a turbulent jet of silane gas into a free-space reaction zone extending a desired length along the central axis of a substantially cylindrical decomposition reactor surrounding said free-space reaction zone, said jet of silane gas being introduced along the central axis of said reactor into said free-space reaction zone, (ii) applying heat circumferentially to the outer wall of the decomposition reactor surrounding the reaction zone, said heat being sufficient to establish a temperature in said reaction zone sufficient to decompose silane to provide silicon and hydrogen gas, the applied heat being a maximum at the circumferential location surrounding the introducing of the jet of silane into said reaction zone and decreasing substantially linearly along the length of the reaction zone with the heat applied circumferentially at the end of the reaction zone being about 30 to 50% of the maximum applied heat.