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A wafer processing boat is provided with parallel slots that support each wafer at a slight angle with respect to vertical so that the wafers lean by gravity in a uniform manner and are thereby arranged in spaced parallel relationship. This enables the tolerances within the slots to be quite large w

A wafer processing boat is provided with parallel slots that support each wafer at a slight angle with respect to vertical so that the wafers lean by gravity in a uniform manner and are thereby arranged in spaced parallel relationship. This enables the tolerances within the slots to be quite large with respect to the width of the wafer edges thus facilitating insertion and removal of the wafers while minimizing wafer damage and increasing wafer processing uniformity.

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A carrier for supporting semiconductor wafers during processing of the wafers including means defining a plurality of closely spaced, parallel slots for receiving and supporting a plurality of wafers in a generally edgewise position, the improvement wherein the width of a slot is such that a wafer c

A carrier for supporting semiconductor wafers during processing of the wafers including means defining a plurality of closely spaced, parallel slots for receiving and supporting a plurality of wafers in a generally edgewise position, the improvement wherein the width of a slot is such that a wafer can be easily installed and removed from a slot and will at no time become wedged in the slot during the processing of the wafers or handling of the carrier, and said slots including side slots for engaging side edges of said wafers and which are formed by spaced, parallel walls which are oriented at a slight angle with respect to vertical and the wafers each lean in the same direction against a corresponding wall in each slot and thereby are supported in spaced parallel relation to each other at the same angle as the side slot wall angle.