초록

A permalloy thin film temperature sensing element in which the NiFe film material is deposited on a substrate in very narrow lines less than about 15 m

대표청구항 ▼

A temperature sensing element comprising: an insulating substrate; an isolating layer on the surface of said substrate; a long narrow thin film resistive path of NiFe deposited on the surface of said isolating layer, said resistive path having a narrow width of less than about 15 m400 A°, said NiFe

A temperature sensing element comprising: an insulating substrate; an isolating layer on the surface of said substrate; a long narrow thin film resistive path of NiFe deposited on the surface of said isolating layer, said resistive path having a narrow width of less than about 15 m400 A°, said NiFe path having a desired temperature coefficient of resistance and by reason of said narrow width and said deposition thickness being relatively insensitive to magnetic field intensity; and, a passivating layer overlaying the resistive material.