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An apparatus for performing continuous treatment in vacuum including an inlet chamber, a first intermediate chamber, at least one vacuum treating chamber, a second intermediate chamber and a withdrawing chamber arranged in the indicated order in a direction in which base plates are successively tran

An apparatus for performing continuous treatment in vacuum including an inlet chamber, a first intermediate chamber, at least one vacuum treating chamber, a second intermediate chamber and a withdrawing chamber arranged in the indicated order in a direction in which base plates are successively transferred. An opening device normally closed and opened when a base plate is transferred therethrough is mounted on a wall at the inlet of the inlet chamber, between the adjacent chambers and on a wall at the outlet side of the withdrawing chamber. A conveyor device for conveying each base plate in a horizontal direction through the opening device is mounted in each of the chambers, and an evacuating device is also mounted in each chamber. A base plate storing device for storing a plurality of base plates in a magazine is mounted in the first and second intermediate chambers. At least one vacuum treating device is mounted in the vacuum treating chamber.

대표청구항 ▼

An apparatus for performing continuous treatment in vacuum, comprising: (a) an inlet chamber having atmospheric leak means connected thereto and including therein a cassette elevator for moving upwardly and downwardly a cassette in which a number of shelves are arranged in a vertically spaced relati

An apparatus for performing continuous treatment in vacuum, comprising: (a) an inlet chamber having atmospheric leak means connected thereto and including therein a cassette elevator for moving upwardly and downwardly a cassette in which a number of shelves are arranged in a vertically spaced relation to receive a number of articles with predetermined spacing intervals defined thereamong, said inlet chamber being adapted to subject, collectively, the number of articles received in said cassette to evacuation treatment; (b) a first intermediate chamber including therein a cassette elevator for moving upwardly and downwardly a cassette in which a number of shelves are arranged in a vertically shaped relation to receive the articles with predetermined spacing intervals defined thereamong, said first intermediate chamber being adapted to receive therein the number of articles in a manner that the articles are received in the cassette located therein; (c) a vacuum treating chamber having at least one vacuum treating means mounted therein; (d) a second intermediate chamber including therein a cassette elevator for moving upwardly and downwardly a cassette in which a number of shelves are arranged in a vertically spaced relation to receive the articles with predetermined spacing intervals defined thereamong, said second intermediate chamber being adapted to receive therein the number of articles in a manner that the articles are received in the cassette located therein; (e) a withdrawing chamber including therein a cassette elevator for moving upwardly and downwardly a cassette in which a number of shelves are arranged in a vertically spaced relation to receive said articles with predetermined spacing intervals defined thereamong, said withdrawing chamber being connected to atmospheric leak means; (f) opening means provided between the adjacent chambers, said opening means being normally closed and opened only when said articles are passed therethrough one by one; (g) conveyor means mounted in each of said chambers for horizontally conveying each of said articles as a single body through said opening means; and (h) evacuating means connected to each of said chambers; (i) said inlet chamber, first intermediate chamber, vacuum treating chamber, second intermediate chamber and withdrawing chamber being arranged successively in a direction in which the articles are successively transferred; (j) the apparatus being constructed such that, while the number of articles in said inlet chamber and said withdrawing chamber are being subject, collectively, to the evacuation treatment, the articles received in the cassette in said first intermediate chamber are taken out successively one by one and horizontally conveyed by said conveyor means and the respective articles thus successively conveyed are successively subject to the vacuum treatment by said vacuum treating means and then conveyed by said conveyor means successively into the cassette in said second intermediate chamber.