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Modular clean room 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F24F-007/10
출원번호 US-0317258 (1981-11-02)
발명자 / 주소
  • Burleson Maurice L. (8003 Woodglen Cir. La Palma CA 90623)
인용정보 피인용 횟수 : 58  인용 특허 : 3

초록

A modular clean room is disclosed for maintaining an environment free of particulate contaminants comprising prefabricated modules which are detachably connected to form a self supporting structure having interior space through which filtered air is flowed. The modules include an air circulating mod

대표청구항

A clean room made of prefabricated modules comprising: a pair of duct modules spaced from each other to define a work space between them, each module having a tubular box-like frame outlining a pair of spaced side walls, a pair of end walls, and a ceiling, and panels attached to the frame to define

이 특허에 인용된 특허 (3)

  1. Fecteau Ronald D. (14203 Huff Warren MI 48091), Clean room filter assembly.
  2. VAN Calsteren Francois Adriaan (Rijswijk Z.H. NL) Hiestand Willem Pieter (Delft NL), Down-flow chamber.
  3. Davis George B. (Frederick MD) Irving Robert W. (Boonsboro MD), Prefabricated knockdown clean room.

이 특허를 인용한 특허 (58)

  1. Siemers, Warren G.; Hamor, Gary D., Adjustable clean-air flow environment.
  2. Hirayama Shoji (No. 3-12-14 ; Chuorinkan Yamato-Shi ; Kanagawa-Ken JPX), Air cleaning apparatus and construction of clean room with the same.
  3. Hirayama Shoji (No. 3-12-14 ; Chuorinkan Yamato-Shi ; Kanagawa-Ken JPX), Air cleaning apparatus and construction of clean room with the same.
  4. Soltis Charles W. (P.O. Box 7328 Houston TX 77248), Air filtering and distribution for laminar flow clean room.
  5. Tsou Hsin-Yi,TWX, Air shower for a clean room system.
  6. Shanks Anthony E. ; Monnens Patrick J. ; Bahn Richard R., Air-purifying system.
  7. Flitsch, Frederick A., Apparatus to support a cleanspace fabricator.
  8. Poynter Richard Q. ; Price Jeffrey L. ; Schoenewolff Michael J. ; Derby Michael C., Aseptic liquid filling.
  9. Clüsserath, Ludwig, Beverage bottling plant for filling bottles with a liquid beverage material and an aseptic bottling system for the aseptic bottling of a liquid material.
  10. Bordin, Andrew, Building air filtration system.
  11. Rapisarda, Joseph; Colley, Timothy, Clean room and method.
  12. Hirayama Shoji (Yamato JPX), Clean room system and unit for the same clean room system.
  13. Daw Terry L. (Salt Lake City UT), Cleanroom structure.
  14. Tsai, Ming-Shang, Container data center.
  15. Scelzi, Michael Craig, Controlling building systems.
  16. Southworth Peter R. (Mission Viejo CA) Baxter Gregory R. (Orange CA), Conveyor system.
  17. Scelzi, Michael Craig; Scelzi, James; Vaitses, Allan H.; Bonwell, William Shawn; Hartman, Mark Christopher, Determining energy consumption in a structure.
  18. Forss John A. (Excelsior MN), Exhaust air system for electrostatic air cleaner.
  19. Scannon, Patrick J.; Bernard, Frank A.; Dadson, Jr., Alfred C.; Tenerowicz, Robert S., Flexible manufacturing system.
  20. Scannon, Patrick J.; Bernard, Frank; Dadson, Jr., Alfred C.; Tenerowicz, Robert S., Flexible manufacturing system.
  21. Cadwell ; Jr. George H. (Blounts Creek NC) Pittman Clarence B. (Pinetown NC), Laminar flow clean room.
  22. Flitsch, Frederick A., Method and apparatus for a cleanspace fabricator.
  23. Flitsch, Frederick A., Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator.
  24. Flitsch, Frederick A., Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator.
  25. Flitsch,Frederick A., Method and apparatus for an elevator system for a multilevel cleanspace fabricator.
  26. Flitsch, Frederick, Method and apparatus to support a cleanspace fabricator.
  27. Flitsch, Frederick A., Method and apparatus to support process tool modules in a cleanspace fabricator.
  28. Jornitz, Maik Wolfgang, Method for connecting modular mobile rooms.
  29. Flitsch, Frederick A., Method of forming a cleanspace fabricator.
  30. Sakauchi Kazuo (Vancouver WA) Hirano Yoshihiro (Vancouver WA) Uchikawa Akira (Vancouver WA), Method of operating a growing hall containing puller cells.
  31. Ward Alec D. (23 Saxon Rd. Pakefield ; Suffolk GB2 NR33 7BS), Method of producing an assembly having at least two intercommunicating chambers.
  32. Flitsch, Frederick A., Methods and apparatus for vertically orienting substrate processing tools in a clean space.
  33. Flitsch, Frederick A., Methods and apparatus for vertically orienting substrate processing tools in a clean space.
  34. Homan,Jane; Thompson,Lee H., Modular biosafety containment apparatus and system.
  35. Dennis J. Gallant, Modular patient room.
  36. Gallant,Dennis J., Modular patient room.
  37. Gallant, Dennis J., Modular wall unit.
  38. Reid, James K.; Reid, John, Modular work station with air collector.
  39. Holtz, R. Barry; Arledge, Troy; Maples, Philip B.; Shanahan, David M., Modular, self-contained, mobile clean room.
  40. Holtz, R. Barry; Arledge, Troy; Maples, Phillip B.; Shanahan, David M., Modular, self-contained, mobile clean room.
  41. Holtz, R. Barry; Arledge, Troy; Maples, Phillip B.; Shanahan, David M., Modular, self-contained, mobile clean room.
  42. Ogura, Hiroyuki; Mitsuhashi, Tsuyoshi; Fukutomi, Yoshiteru; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units.
  43. Ogura, Hiroyuki; Mitsuhashi, Tsuyoshi; Fukutomi, Yoshiteru; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units.
  44. Varley, John O.; Hartmann, Mark C., Open fume capture and exhaust ventilated work station.
  45. Gallant, Dennis J, Patient point-of-care water sterilizer.
  46. Grundy David A., Portable cleanroom cabinet assembly.
  47. Woo Sik Yoo ; Taro Yamazaki, Portable enclosure for semiconductor processing.
  48. Marinoni, Attilio, Prefabricated white chamber structure.
  49. McAnallen Kevin,IEX ; McAnallen Sean,IEX ; Dully James,IEX ; Murray Conor,IEX ; Corrigan Ciaran,IEX, Sterile room structures.
  50. Fukutomi, Yoshiteru; Mitsuhashi, Tsuyoshi; Ogura, Hiroyuki; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Substrate treating apparatus.
  51. Ogura, Hiroyuki; Mitsuhashi, Tsuyoshi; Fukutomi, Yoshiteru; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates.
  52. Ogura, Hiroyuki; Mitsuhashi, Tsuyoshi; Fukutomi, Yoshiteru; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Substrate treating apparatus with substrate reordering.
  53. Fukutomi, Yoshiteru; Mitsuhashi, Tsuyoshi; Ogura, Hiroyuki; Morinishi, Kenya; Kawamatsu, Yasuo; Nagashima, Hiromichi, Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units.
  54. Lehman, William R., System and method for removing contaminates from the air in a mail-sorting room.
  55. Stout,David A.; Lehman,William R., System and method for removing contaminates from the air in a mail-sorting room.
  56. Rose Robert L., Under floor reconfigurable utilities support structure.
  57. Ozeki, Kazuhiro, Unit type clean room.
  58. Gallant, Dennis J.; Lanci, Dennis M., Wall unit having concealable service outlets.
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