초록 ▼

A sample transport system adaptable for use in an MBE instrument includes means for introducing a plurality of substrates into a storage chamber and means for conveying each substrate on a preselected basis to a processing chamber whereby the wafers not being processed are completely protected again

A sample transport system adaptable for use in an MBE instrument includes means for introducing a plurality of substrates into a storage chamber and means for conveying each substrate on a preselected basis to a processing chamber whereby the wafers not being processed are completely protected against contaminants which may occur within the processing chamber.

대표청구항 ▼

A transport system useful for introducing and conveying a plurality of workpieces within an ultra-high vacuum apparatus, said system comprising: means for retaining a plurality of workpieces in a stacked spaced relationship; means for selectively positioning said retaining means within said apparatu

A transport system useful for introducing and conveying a plurality of workpieces within an ultra-high vacuum apparatus, said system comprising: means for retaining a plurality of workpieces in a stacked spaced relationship; means for selectively positioning said retaining means within said apparatus; means for conveying a selected workpiece from said retaining means to a processing chamber; and means for interlocking said retaining means and said positioning means; said interlocking means including a platform assembly having a surface upon which said retaining means can be positioned; said interlocking means further including at least one pawl which, when said retaining means is positioned on said assembly surface, extends into a recess in the bottom of said retaining means and which, when said assembly is urged toward said retaining means, grasps an internally extending shelf within said recess.