[특허]Ion beam coating apparatus

Ion beam coating apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C23C-013/08
출원번호	US-0423454 (1982-09-24)
발명자 / 주소	Little Roger G. (Bedford MA) Shanfield Stanley R. (West Newton MA)
출원인 / 주소	Spire Corporation (Bedford MA 02)
인용정보	피인용 횟수 : 45 인용 특허 : 0

초록 ▼

A coating apparatus and method for coating industrial cutting and turning tools of any desired shape and configuration and the like significantly to improve the tools\working properties. The coating is formed of cubic boron nitride, with a preferred thickness not exceeding ten microns. The coating apparatus includes an rf excited plasma source chamber having a gas feed ring for ionizing a gas admitted into the chamber via the ring. The preferred feed gas is a borazine and benzene vapor mixture. A coating chamber is mounted adjacent to and contiguous with the plasma source chamber via a neck portion. The coating chamber includes a vacuum interlock to permit the entry and removal of a tool transport. At least one vacuum pump is operatively connected to the chamber. Preferably, a plurality of permanent magnets and electron supply filaments are arranged circumferentially about the plasma source chamber. Preferably, the tool transport is rotatable during coating. Preferably, the apparatus is microprocessor controlled.

대표청구항 ▼

Apparatus for coating parts by means of a plasma supported ion beam comprising: (a) a plasma source chamber provided with an anode and having rf means for exiting a plasma therein, a gas feed ring at one end and a neck portion at the other end thereof; (b) a coating chamber mounted adjacent and contiguous with said plasma source chamber via said neck portion; (c) a plurality of permanent magnets and a plurality of electron supply filaments both arranged circumferentially about said source chamber, with adjacent magnets of said plurality of permanent magnets having opposed polarity, the relative positions of said anode, said electron supply filaments and said magnets being such that the permanent magnets will be capable of increasing the path lengths of electrons between said filaments and said anode; (d) vacuum pump means operatively connected to both said chambers; and (e) a vacuum interlock provided in said coating chamber so as to admit said parts to be coated into said coating chamber.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Ion beam coating apparatus 원문보기

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Ion beam coating apparatus 원문보기

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이 특허를 인용한 특허 (45)

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