초록 ▼

The inner cryopanel of a cryopump includes a substrate having a plurality of holes such that the open areas represent 30% to 70% of the surface area of the substrate. A layer of cryosorbing material is secured to one surface of the substrate. An imperforate panel is juxtaposed to said one surface of

The inner cryopanel of a cryopump includes a substrate having a plurality of holes such that the open areas represent 30% to 70% of the surface area of the substrate. A layer of cryosorbing material is secured to one surface of the substrate. An imperforate panel is juxtaposed to said one surface of said substrate.

대표청구항 ▼

In a cryopump comprising an inner cryopanel adapted to freeze out gases in an evacuated environment, said cryopanel including a substrate having a layer of cryosorbing material secured to one surface thereof, said material being capable of desorbtion at room temperature, said substrate having a plur

In a cryopump comprising an inner cryopanel adapted to freeze out gases in an evacuated environment, said cryopanel including a substrate having a layer of cryosorbing material secured to one surface thereof, said material being capable of desorbtion at room temperature, said substrate having a plurality of aligned holes such that the open area represents 30% to 70% of the surface area of the substrate, and said cryopanel including an imperforate panel juxtaposed to and spaced from said cryosorbing material.