초록 ▼

A piezoelectric tuning fork vibrator used as an oscillator or a detection element in various electronic circuits, which is provided at a vibrator body with a slit to form tuning fork legs at both sides, one leg at the vibrator having at the outside surface a piezoelectric thin film and an electrode

A piezoelectric tuning fork vibrator used as an oscillator or a detection element in various electronic circuits, which is provided at a vibrator body with a slit to form tuning fork legs at both sides, one leg at the vibrator having at the outside surface a piezoelectric thin film and an electrode thereon, so that the one leg including the piezoelectric thin film and electrode, is made equal in width to the other leg. Hence, the both side tuning fork legs equal in width become equal in the resonance frequency and avoids leakage of vibration energy, whereby this piezoelectric vibrator is free from characteristic variation and has a high accuracy.

대표청구항 ▼

A piezoelectric tuning fork vibrator comprising a vibrator body having two side-by-side tuning fork legs having respective widths W1 and W2, and a piezoelectric thin film and an electrode having a combined width W3, mounted to the outside surface of the one of said legs having width W2 so that said

A piezoelectric tuning fork vibrator comprising a vibrator body having two side-by-side tuning fork legs having respective widths W1 and W2, and a piezoelectric thin film and an electrode having a combined width W3, mounted to the outside surface of the one of said legs having width W2 so that said one of said legs and said piezoelectric thin film and electrode have a combined width of W2+W3, said combined width of W2+W3 being about equal to said width W1 of the other of said legs, thereby eliminating leakage of vibration energy.