초록 ▼

Integrated accelerometers comprising a flap (2) fixed to a carrier (1) by two attachment means (3) which are disposed symmetrically and in line with one side of the flap. An electrode (5) deposited on a plate (4) permits acceleration to be measured by measuring the corresponding variation in capacit

Integrated accelerometers comprising a flap (2) fixed to a carrier (1) by two attachment means (3) which are disposed symmetrically and in line with one side of the flap. An electrode (5) deposited on a plate (4) permits acceleration to be measured by measuring the corresponding variation in capacitance between the flap (2) and the electrode (5).

대표청구항 ▼

An integrated semiconductor accelerometer comprising: a semiconductor carrier substrate defining a plane; a semiconductor flap member only two resilient attachment means coupled to said substrate in opposed and coaxial relationship for mounting said flap for rotation about only one axis, said attach

An integrated semiconductor accelerometer comprising: a semiconductor carrier substrate defining a plane; a semiconductor flap member only two resilient attachment means coupled to said substrate in opposed and coaxial relationship for mounting said flap for rotation about only one axis, said attachment means providing rotation of said flap member about said one axis in response to an acceleration perpendicular to said plane and causing a return torque to be applied to said flap member, said substrate, said flap member and said attachment means being formed of a single thin piece of monocrystalline silicon with said flap and said attachment means being heavily doped with boron creating longitudinal stresses on the flap attachment means which thus rigidly resist movements of the flap member other than movements about said one axis, at least one electrode disposed facing said flap member in a plane parallel to the plane defined by said substrate; and means for producing a signal which is a function of the distance between said flap member and said electrode and represents acceleration to which said flap member is subjected.