초록 ▼

A gas is introduced into a surface treatment chamber and is activated therein. The surface of a specimen placed in the surface treatment chamber is treated by using reactive species generated by this activation. A means of supplying controllable energy such as the energy of heat, light, or electron

A gas is introduced into a surface treatment chamber and is activated therein. The surface of a specimen placed in the surface treatment chamber is treated by using reactive species generated by this activation. A means of supplying controllable energy such as the energy of heat, light, or electron beams is provided in a stage preceding the surface treatment chamber so as to activate the gas beforehand. The pre-activated gas is introduced into the surface treatment chamber and is activated again therein.

대표청구항 ▼

A surface treatment apparatus wherein a material gas is introduced into a surface treatment chamber and activated therein, and wherein the surface of a specimen placed in said surface treatment chamber is treated by reactive species of said material gas generated by said activation, said surface tre

A surface treatment apparatus wherein a material gas is introduced into a surface treatment chamber and activated therein, and wherein the surface of a specimen placed in said surface treatment chamber is treated by reactive species of said material gas generated by said activation, said surface treatment apparatus further comprising a preliminary chamber for receiving a material gas, means for supplying controllable energy through a wall of said preliminary chamber to said material gas to activate said material gas in a stage preceding said surface treatment chamber, and means for introducing the material gas containing particles thus activated into said surface treatment chamber wherein said initially activated material gas is further activated to treat the surface of said specimen.