초록 ▼

A sputter coating machine includes a rectilinearly translatable load-lock door closing off one end of an evacuable chamber. Wafers to be coated are loaded and unloaded by an elevator blade onto a chuck carried from the inside surface of the door. A clamping ring clamps the wafer to the chuck and adv

A sputter coating machine includes a rectilinearly translatable load-lock door closing off one end of an evacuable chamber. Wafers to be coated are loaded and unloaded by an elevator blade onto a chuck carried from the inside surface of the door. A clamping ring clamps the wafer to the chuck and advances the wafer through the open throat of a gate-valve portion of the chamber into position opposite a magnetron sputter gun carried from a second door closing off the other end of the chamber. The second door is movable away from the chamber on guide rails and pivotable about an axis for ease of maintenance.

대표청구항 ▼

In a wafer processing machine for processing wafers of the type wherein wafers, in a wafer carrier open on the top and bottom and having slots in the side walls for holding the wafers, are transported to or from the wafer carrier relative to a wafer process station: wafer pickup blade means passing

In a wafer processing machine for processing wafers of the type wherein wafers, in a wafer carrier open on the top and bottom and having slots in the side walls for holding the wafers, are transported to or from the wafer carrier relative to a wafer process station: wafer pickup blade means passing transversely through the wafer carrier from the bottom for engagement with the wafers for transport of the wafers relative to the wafer process station; wafer carrier transport means for sequentially moving the wafer carrier relative to said pick up blade means so as to serially move respective wafers relative to the wafer process station; indexing means operatively associated with said wafer carrier transport means for indexing the position of said wafer carrier relative to said wafer pickup blade means and having a linear array of radiant energy indicia indicative of the position of said wafers within the wafer carrier; radiant energy readout means operatively associated with said linear array of radiant energy indicia for giving an output when a respective one of said radiant energy indicia is in registration relative to said readout means, whereby the position of the wafers in the wafer carrier relative to the position of said wafer pickup blade means is determined in use.