[특허]Capacitive pressure transducer

[미국특허] Capacitive pressure transducer 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01L-009/12 H01G-007/00
출원번호	US-0738539 (1985-05-24)
발명자 / 주소	Bell Robert L. (Chatsworth CA)
출원인 / 주소	Bell Microcomponents, Inc. (Newbury Park CA 02)
인용정보	피인용 횟수 : 58 인용 특허 : 3

초록 ▼

A capacitive pressure transducer is comprised of a deflectable diaphragm and a substantially planar reference plate, both preferably molded of ceramic. The diaphragm includes a sensor electrode ring disposed about a central region thereof and a concentric reference electrode ring substantially encompassing the sensor electrode, with a guard ring between the electrodes to electrically isolate the reference electrode from the sensor electrode. The reference plate is disposed in facing relation to the deformable flat surface of the diaphragm and includes a sensor electrode ring disposed and in opposition to the sensor electrode on the diaphragm to form a sensing capacitor therewith. Spacer means disposed in the central region between the diaphragm and the reference plate intercouple the two elements and maintain a substantially fixed dimension in the central region therebetween while permitting deformation of the diaphragm in response to pressure variations. The spacer means is conductive and facilitates electrical connection to the sensor electrode on the reference plate. A cover is disposed about the reference plate and coupled to the periphery of the diaphragm, and includes a reference electrode ring in facing relation to the reference electrode on the diaphragm to form a reference capacitor therewith.

대표청구항 ▼

A capacitive pressure transducer comprising: a diaphragm having a substantially flat deformable surface, the diaphragm including an annular sensor electrode disposed about a central deformable region thereof concentric with a central axis, an annular reference electrode, said electrodes each terminating in a conductive contact path to the exterior, an electrically grounded guard electrode and positioned between said sensor electrode and said reference electrode, said sensor electrode, said reference electrode, and said guard electrode being concentric about the central axis, and said diaphragm further including thin film conductive means in the central region of said diaphragm including a conductive path to the exterior of the transducer; means communicating with at least one side of the diaphragm for introducing a fluid whose pressure is to be determined into contact with the diaphragm to deform same; a substantially planar reference plate disposed in facing relation to the deformable surface of the diaphragm, said reference plate having an annular sensor electrode disposed about the central region and facing the sensor electrode on the diaphragm to form a sensing capacitor therewith, and thin film conductive means in the central region of said reference plate, including a conductive path to said sensor electrode on said reference plate; conductive spacer means interconnecting the diaphragm and the reference plate in the central region thereof to maintain a substantially fixed dimension in the central region between the diaphragm and the reference plate while permitting deformation of the diaphragm, said spacer means interconnecting the thin film conductive means on said diaphragm with the thin film conductive means on the reference plate, whereby an electrical connection from the sensor electrode on the reference plate is taken through the spacer means; and a cover disposed about the reference plate, said cover comprising a depending flange connected to the outer periphery of the diaphragm, and including an annular reference electrode in facing relation to the reference electrode on the diaphragm, to form a reference capacitor therebetween, said reference electrode on said cover terminating in a conductive path to the exterior.

이 특허에 인용된 특허 (3) 인용/피인용 타임라인 분석

Geronime ; Robert L., Capacitive load cell.
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Bell Robert L. (Chatsworth CA), Force responsive transducer.
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Delatorre Leroy C. (10 Crestwood Sugarland TX 77478), Pressure sensors.
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이 특허를 인용한 특허 (58) 인용/피인용 타임라인 분석

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Dani, Alain; Li, Xiaoxi; Schlereth, Jochen; Bodenstein, Tobias, Capacitive control element with improved malfunction immunity.
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Kamrath,Robert F.; Hamerly,Michael E.; Weaver,Billy L., Capacitor based force sensor.
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Ishikura, Yoshiyuki, Capacity type pressure sensor and method of manufacturing the pressure sensor.
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Lischer,D. Jeffrey; Traverso,Robert, Contaminant deposition control baffle for a capacitive pressure transducer.
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Schulte, John P.; Tyson, David G.; Klosinski, Andrew J., Differential pressure sensor with line pressure measurement.
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Broden, David A.; Hedtke, Robert C.; Klosinski, Andrew J.; Sittler, Fred C., Differential pressure transmitter with complimentary dual absolute pressure sensors.
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Hedtke, Robert C., Differential pressure transmitter with pressure sensor.
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Orth, Kelly M., Field device with dynamically adjustable power consumption radio frequency communication.
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Grudzien ; Jr. Christopher P., Fluid pressure sensor with contaminant exclusion system.
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Van Bergen, Michael, Force sensor.
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Vanderaa, Joel D.; Grunig, Christina A.; Hurd, Ronald F.; Westfield, Brian L.; McGuire, Chad M.; Paullus, Steven B., Form factor and electromagnetic interference protection for process device wireless adapters.
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Klosinski, Andrew J.; Broden, David A.; Sittler, Fred C., Industrial process control pressure transmitter and flange coupling.
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Harasyn,Donald E.; Willcox,Charles R., Line pressure measurement using differential pressure sensor.
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Grudzien, Chris P., Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor.
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Grudzien,Chris P., Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor.
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Willcox, Charles R., Method and apparatus for pressure measurement using magnetic property.
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Hedtke, Robert C.; Lu, Liangju, Method and apparatus for pressure measurement using quartz crystal.
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Jonsson,Steffan, Method for producing a pressure sensor for detecting small pressure differences and low pressures.
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Grudzien,Chris P., Method of forming a seal between a housing and a diaphragm of a capacitance sensor.
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Grudzien,Chris P., Method of forming a seal between a housing and a diaphragm of a capacitance sensor.
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Yogesh B. Gianchandani, Method of forming micromachined sealed capacitive pressure sensors.
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Moser Thomas M. ; Dolezalek Charles R. ; Jost Michael B. ; Olson Mark H., Mounting assembly for a pressure transmitter.
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Charles R. Willcox ; Mark A. Lutz ; Mark G. Romo ; Stanley E. Rud, Jr., Oil-less differential pressure sensor.
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Sittler, Fred C.; Willcox, Charles R.; Rud, Jr., Stanley E., Optical pressure sensor.
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Brown, Gregory C.; Klosinski, Andrew J.; Trimble, Steven R.; Fandrey, Mark, Power generation for process devices.
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Arunachalam, Jawahar; Kasturi, Udayashankar Bangalore, Power supply for industrial process field device.
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Jonsson Staffan (Sollentuna SEX) Olsson Ray (Åland FIX), Pressure sensor.
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Kobayashi, Mitsuru; Inoue, Hiroshi; Makinaga, Hitoshi; Imai, Junji; Masaki, Yasufumi; Ikegawa, Naoto; Nakahara, Youichiro, Pressure sensor.
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Sawada Kenichi,JPX ; Mitani Tateki,JPX, Pressure sensor.
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Harasyn,Donald E.; Willcox,Charles R.; Klosinski,Andrew J., Pressure sensor fault detection.
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Jonsson,Steffan, Pressure sensor for detecting small pressure differences and low pressures.
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Schumacher,Mark; Klosinski,Andrew, Pressure sensor with deflectable diaphragm.
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Nassar, Marcos A.; Cordan, Ernest W.; Urban, Mark L., Pressure transducer with capacitively coupled source electrode.
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Hedtke,Robert C., Pressure transmitter with acoustic pressure sensor.
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Olson Mark H. ; Jost Michael B. ; Bischoff Brian J. ; Moser Thomas M., Pressure transmitter with high pressure isolator mounting assembly.
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Frick Roger L. ; Rud Jr. Stanley E. ; Broden David A., Process pressure measurement devices with improved error compensation.
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Frick, Roger L., Process sensor module having a single ungrounded input/output conductor.
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Hedtke, Robert C., Process transmitter with wireless communication link.
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Kielb, John A.; Karschnia, Robert J.; Westfield, Brian L.; Orth, Kelly M.; Broden, David A., RF adapter for field device.
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Kielb, John A.; Westfield, Brian L., RF adapter for field device with loop current bypass.
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Kielb, John A.; Westfield, Brian L.; Orth, Kelly M., RF adapter for field device with low voltage intrinsic safety clamping.
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Kielb, John A., RF adapter for field device with variable voltage drop.
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Klosinski, Andrew J.; Willcox, Charles R., Resonant frequency based pressure sensor.
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Yogesh B. Gianchandani, Sealed capacitive pressure sensors.
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Wang, Rongtai, Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter.
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Silverbrook,Kia; Mallinson,Samuel George, Temperature compensating pressure sensor having active and reference membranes.
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Grudzien,Chris P., Turbo sump for use with capacitive pressure sensor.
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Vanderaa, Joel D.; Grunig, Christina A.; Hurd, Ronald F., Wireless communication adapter for field devices.
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Strei, David Matthew; Vanderaa, Joel David, Wireless process communication adapter with improved encapsulation.
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Nelson, Richard L.; Ostby, Philip G.; Brown, Gregory C., Wireless process field device diagnostics.
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[미국특허] Capacitive pressure transducer 원문보기

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이 특허에 인용된 특허 (3) 인용/피인용 타임라인 분석

이 특허를 인용한 특허 (58) 인용/피인용 타임라인 분석

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