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Method and means for improved heat removal in compact semiconductor integrated circuits 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/34
  • H01L-023/46
  • H01L-023/36
출원번호 US-0587018 (1984-03-07)
발명자 / 주소
  • Tuckerman David B. (Stanford CA) Pease Roger F. W. (Stanford CA)
출원인 / 주소
  • The Board of Trustees of the Leland Stanford Junior University (Stanford CA 02)
인용정보 피인용 횟수 : 97  인용 특허 : 3

초록

A semiconductor chip having improved heat dissipation capability. The back surface of a semiconductor chip is provided with microscopic channels defined by fins in intimate contact with the chip. A cover is affixed to the fins to enclose the channels for the laminar flow of coolant fluid. The chip c

대표청구항

A heat generating device having improved heat removal capability comprising a body portion having an external surface for cooling, a plurality of microscopic channels defined by fins in intimate contact with said external surface, each of said microscopic channels having a width selected to increase

이 특허에 인용된 특허 (3)

  1. Klein Erwin (Heddesheim DEX) Henke Arno (Gorxheimertal DEX) Zink Hans (Heddesheim DEX), Cooling container for cooling a semiconductor element.
  2. Pellant Michal (Prague CSX) Zuna Jaroslav (Prague CSX) Novak Petr (Prague CSX) Zavazal Zdenek (Prague CSX) Kratina Jindrich (Prague CSX) Reichel Pavel (Prague CSX) Kafunek Pavel (Prague CSX), Liquid cooler for semiconductor power elements.
  3. Tuckerman David B. (Stanford CA) Pease Roger F. W. (Stanford CA), Method and means for improved heat removal in compact semiconductor integrated circuits and similar devices utilizing co.

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