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A gas detector includes a gas detecting element comprised of a metal oxide semiconductor material which changes its value of electrical resistance at an elevated temperature when it absorbs a gas. In one form, the gas detecting element is supported in the form of a bridge so as to increase its respo

A gas detector includes a gas detecting element comprised of a metal oxide semiconductor material which changes its value of electrical resistance at an elevated temperature when it absorbs a gas. In one form, the gas detecting element is supported in the form of a bridge so as to increase its response speed by making thermal capacity as small as possible. In another form, the gas detecting element is supported in the form of a cantilever, more preferably in the form of a ring as formed along the periphery of a overhang portion of a disc-shaped layer of electrically insulating material. Also provided is a process for manufacturing a thin film of metal oxide, which may be advantageously used as a gas detecting element of a gas detector or a transparent electrode, for example, in a liquid crystal panel.

대표청구항 ▼

A gas detector comprising: a substrate; an insulating layer formed on said substrate and having a projection which extends into the air; at least two electrically conductive heater strips formed on said projection as spaced apart from each other; means for applying a driving signal to said heater st

A gas detector comprising: a substrate; an insulating layer formed on said substrate and having a projection which extends into the air; at least two electrically conductive heater strips formed on said projection as spaced apart from each other; means for applying a driving signal to said heater strips; a gas detecting layer formed as extending between said heater strips, said gas detecting layer changing its electrical resistance when it absorbs a gas; and means for detecting changes in the electrical resistance of said gas detecting layer.