초록 ▼

A fluid (12), such as dichlorosilane, is stored in a pressure vessel (17) located at a site remote from a processing facility within the confines of a building (14). At such remote site the pressure vessel (17) is subject to climatic temperature variations over a range at the lower temperatures of w

A fluid (12), such as dichlorosilane, is stored in a pressure vessel (17) located at a site remote from a processing facility within the confines of a building (14). At such remote site the pressure vessel (17) is subject to climatic temperature variations over a range at the lower temperatures of which a vapor pressure of the fluid may be insufficient to generate a pressure within the pressure vessel to drive the fluid through a duct (36) toward the processing facility. A supply of an inert gas (34) is applied at a first predetermined pressure to the pressure vessel (17) to urge the fluid under such predetermined pressure through the duct (36) toward an evaporator vessel (38) located at the processing facility. The evaporator vessel (38) is maintained at a first predetermined elevated temperature at which the fluid at such first predetermined pressure is in a gaseous state. Any of the fluid urged toward and entering the evaporator vessel (38) is evaporated, such that a supply of the fluid in its gaseous state at the first predetermined pressure is maintained within the evaporator vessel (38). Fluid is drawn from the evaporator vessel and its pressure is reduced, advantageously by a heated regulator (43), to a second predetermined and stable pressure at which the fluid remains a gas at temperatures existing at the processing facility within the building (14). The amount of the fluid within the confines of the building (14) is by the described method and apparatus kept near a practical minimum.

대표청구항 ▼

A method of storing and delivering a fluid, comprising: storing the fluid in its liquid state in a pressure vessel located at a site remote from a processing facility; delivering the fluid in its liquid state under a first predetermined pressure to an evaporator vessel located at the processing faci

A method of storing and delivering a fluid, comprising: storing the fluid in its liquid state in a pressure vessel located at a site remote from a processing facility; delivering the fluid in its liquid state under a first predetermined pressure to an evaporator vessel located at the processing facility; maintaining the evaporator vessel substantially at a first predetermined temperature above an ambient temperature range, such that the fluid at such first predetermined temperature and first predetermined pressure is substantially always in a gaseous state, thereby evaporating the fluid entering the evaporator vessel and maintaining in the evaporator vessel a supply of the fluid in its gaseous state at such first predetermined pressure; drawing fluid from the supply of fluid in the evaporator vessel for use within the processing facility; reducing the pressure of such drawn off fluid to a second predetermined pressure of such magnitude at which the fluid retains its gaseous state at a temperature in a range expected to be maintained within the processing facility; and delivering the fluid at substantially such second predetermined pressure to a usage destination within the processing facility.