초록 ▼

A cryopump has a two-stage refrigerator in a housing with a pumping surface area in thermal communication with each stage of the refrigerator for gas-pumping by adsorption or absorption when the refrigerator is operated. A roughing vacuum pump provides a pressure of from about 1 to about 10-3 mbar t

A cryopump has a two-stage refrigerator in a housing with a pumping surface area in thermal communication with each stage of the refrigerator for gas-pumping by adsorption or absorption when the refrigerator is operated. A roughing vacuum pump provides a pressure of from about 1 to about 10-3 mbar to the housing and at least the pumping surface area of the second refrigerator stage is heated sufficiently to prevent gas adsorption or absorption thereon before the cryopump is operatively connected to a space to be evacuated therewith as a starting method for improving the cryopumping of, particularly, helium and a regenerating method after use of the cryopump.

대표청구항 ▼

A method for one of starting and regenerating a cryopump having a housing operatively connectable to a space to be evacuated with the cryopump, a two-stage refrigerator in the housing, and means providing a pumping surface area in thermal communication with each stage of the refrigerator for at leas

A method for one of starting and regenerating a cryopump having a housing operatively connectable to a space to be evacuated with the cryopump, a two-stage refrigerator in the housing, and means providing a pumping surface area in thermal communication with each stage of the refrigerator for at least one of gas-pumping adsorption and absorption thereon when the refrigerator is operated, comprising: evacuating the housing to a pressure of from about 1 to about 10-3 mbar and heating at least the pumping surface area of the second stage of the refrigerator at least just before the cryopump is operatively connected to the space to be evacuated with the cryopump at least sufficiently to prevent gas adsorption and absorption thereon.