초록 ▼

A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. Upper and lower bell jars, which seal to a sealing plate, provide access to the cassette by outside and vacuum transport mechanisms, respect

A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. Upper and lower bell jars, which seal to a sealing plate, provide access to the cassette by outside and vacuum transport mechanisms, respectively. A right angle passthrough cassette allows orthogonal access. An improved vacuum feedthrough actuates both the upper bell jar and the internal cassette.

대표청구항 ▼

A load lock apparatus comprising: a plate having a central aperture and vents for connecting said aperture to an evacuation system; a lower bell jar adapted to seal to said plate around said aperture; an upper ball jar adapted to seal to said plate around said aperture; and a wafer cassette adapted

A load lock apparatus comprising: a plate having a central aperture and vents for connecting said aperture to an evacuation system; a lower bell jar adapted to seal to said plate around said aperture; an upper ball jar adapted to seal to said plate around said aperture; and a wafer cassette adapted to be enclosed between said upper and lower bell jars.