초록 ▼

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area

A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in the people-occupied area of the clean room and a rear portion (46) positioned in the process machine area aerodynamically isolated from people. A moveable glider plate (50) is adapted to receive the carrier (10) and is initially positioned in an aperture provided in the upper surface of forward portion (42). A gearing mechanism (54) is provided which cooperates with glider plate (50) to move the semiconductor slice cassettes mounted on the base of carrier (10) between forward portion (42) and rear portion (46). The semiconductor slices are shielded from particulate contamination as the semiconductor cassette is transported on glider plate (50) between forward portion (42) and rear portion (46) and for evacuating any particulate contamination generated within transport mechanism (40) to create a negative pressure therein relative to the people-occupied area and the process machine area.

대표청구항 ▼

An apparatus for transporting semiconductor slice cassettes in a portable carrier between a high contamination area and a low contamination area, said portable carrier having a base carrying the slice cassettes and a cover removably attached to the base, comprising: a housing having a forward portio

An apparatus for transporting semiconductor slice cassettes in a portable carrier between a high contamination area and a low contamination area, said portable carrier having a base carrying the slice cassettes and a cover removably attached to the base, comprising: a housing having a forward portion disposed in the high contamination area and a rear portion positioned in the low contamination area said rear portion isolated from said forward portion by a barrier wall; said housing having an interior portion in communication with the high contamination area through a first access opening in said forward portion and with the low contamination area through a second access opening in said rear portion; the cover of the portable carrier being sealingly receivable over the first access opening to isolate the interior portion of the housing from the high cotamination area; means for creating a positive pressure within the portable carrier prior to removing of the cover of the portable carrier from the base; means for creating a negative pressure within the interior of said housing relative to both the high and low contamination areas; support means disposed within said housing for receiving the base of the portable carrier and operable to be alternately disposed proximate said first access opening and said second access opening to move the base of the portable carrier and the slice cassettes therebetween; and motive force means disposed within said housing for causing said support means and at least a portion of the portable carrier to be moved between said first access opening and said second access opening.