초록 ▼

In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plu

In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plurality of substrates held horizontally and parallel to each other; a first substrate convey mechanism contacting a single door of the substrate processing apparatus and forming a common conveyance path of all substrates; a single substrate posture control stage arranged in contact with the first convey mechanism to correct a posture of the substrate to be fed in the substrate processing apparatus; second substrate convey mechanisms for forming at least one conveyance path between the plurality of cassette stages and the substrate posture control stage and exchanging and conveying the substrate; and substrate counters arranged in the respective conveyance paths of the second substrate convey mechanisms. The processed substrates are returned to the original cassette.

대표청구항 ▼

An automatic loader for automatically loading unprocessed substrates to a substrate processing apparatus for processing flat substrates and automatically unloading the substrates processed by said substrate processing apparatus, comprising: a plurality of cassette stages for moving vertically upward

An automatic loader for automatically loading unprocessed substrates to a substrate processing apparatus for processing flat substrates and automatically unloading the substrates processed by said substrate processing apparatus, comprising: a plurality of cassette stages for moving vertically upward or downward a cassette which holds a plurality of horizontal substrates parallel to each other, the plurality of cassette stages being rotated about a substantially vertical axis; a first substrate convey mechanism having a common conveyance path for conveying all the substrates to said substrate processing apparatus through a single door thereof or conveying all the substrates from said substrate processing apparatus therethrough; a single substrate posture control stage, arranged to be substantially in contact with one end of said first substrate convey mechanism opposite to said substrate processing apparatus, for controlling within a predetermined range a posture of the substrate to be fed in said substrate processing apparatus along a feed direction; a plurality of second substrate convey mechanisms, having at least one conveyance path between said plurality of cassette stages and said substrate posture control stage, for exchanging the substrate with each of said cassette stages and said substrate posture control stage and conveying the substrate; and a substrate counter, arranged on each conveyance path of said first and second substrate convey mechanisms, for counting the number of substrates fed in said substrate processing apparatus or returned therefrom.