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Inorganic-polymer-derived dielectric films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-005/06
  • B05D-005/12
  • B05D-007/24
출원번호 US-0704697 (1985-02-25)
발명자 / 주소
  • Brinker C. Jeffrey (Albuquerque NM) Keefer Keith D. (Albuquerque NM) Lenahan Patrick M. (State College PA)
출원인 / 주소
  • The United States of America as represented by the United States Department of Energy (Washington DC 06)
인용정보 피인용 횟수 : 65  인용 특허 : 1

초록

A method of coating a substrate with a thin film of a polymer of predetermined porosity comprises depositing the thin film on the substrate from a non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polymeric network forming cation, water, an alcohol compatible with the hydr

대표청구항

A method of coating a substrate with a thin film of a polymer of predetermined porosity, comprising: depositing the thin film on the substrate from a dilute non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polyermic network-forming cation, water, an alochol or other solve

이 특허에 인용된 특허 (1)

  1. Nakayama Muneo (Tokyo JPX) Nishimura Toshihiro (Kawasaki JPX) Nakane Hisashi (Kawasaki JPX) Toda Shozo (Fujisawa JPX) Hotta Yoshio (Yamato JPX) Minato Mitsuaki (Kawasaki JPX), Liquid compositions for forming silica coating films.

이 특허를 인용한 특허 (65)

  1. Douglas M. Smith ; Gregory P. Johnston ; William C. Ackerman ; Shin-Puu Jeng ; Bruce E. Gnade, Aerogel thin film formation from multi-solvent systems.
  2. Brinker Charles Jeffrey ; Prakash Sai Sivasankaran, Ambient pressure process for preparing aerogel thin films reliquified sols useful in preparing aerogel thin films.
  3. Kazuhiro Nakamura JP; Tomokazu Yasuda JP; Taku Nakamura JP, Anti-reflection film and display device having the same.
  4. Liang, Liang; Blacker, Richard; Kalyankar, Nikhil D.; Jewhurst, Scott, Anti-reflection glass made from sol made by blending tri-alkoxysilane and tetra-alkoxysilane inclusive sols.
  5. Lee James C. (Plymouth MN), Apparatus for applying multilayer optical interference coating on complex curved substrates.
  6. Vorse Dennis J. ; Ferrell Victor E. ; Gausman Joseph H., Aqueous protective and adhesion promoting composition.
  7. Vorse Dennis J. ; Ferrell Victor E. ; Gausman Joseph H., Aqueous protective and adhesion promoting composition.
  8. Halsey, IV, Eugene L.; Cherif, Mondher, Capacitive touch screen and method of making same.
  9. Carre Alain,FRX ; Prassas Michel,FRX ; Waku-Nsimba Jean,FRX, Coating for imparting non-stick, abrasion resistant and non-wetting properties to inorganic articles.
  10. Leung, Roger; Endisch, Denis; Xie, Songyuan; Hacker, Nigel; Deng, Yanpei, Colloidal silica composite films for premetal dielectric applications.
  11. Park, Sung-Soon; Zheng, Haixing, Composition and method for a coating providing anti-reflective and anti-static properties.
  12. Sung-Soon Park ; Haixing Zheng, Composition and method for a coating providing anti-reflective and anti-static properties.
  13. Barton, Roger W.; Nystrom, Michael J.; Mackey, Bob L.; Pan, Lawrence S.; Pei, Shiyou; Wallace, Stephen; Smith, Douglas M., Constitution and fabrication of flat-panel display and porous-faced structure suitable for partial of full use in spacer of flat-panel display.
  14. Harvey, Michael; Meredith, Paul, Control of morphology of silica films.
  15. Ryan Vivian W. (Nutley NJ) Smolinsky Gerald (Madison NJ), Devices involving silicon glasses.
  16. Gaynor Justin F., Dielectric layer including silicalite crystals and binder and method for producing same for microelectronic circuits.
  17. Gaynor, Justin F.; Huang, Judy, Dispersions of silicalite and zeolite nanoparticles in nonpolar solvents.
  18. Cherif,Mondher; Tallon,Brian M.; Halsey, IV,Eugene L., Display substrate with diffuser coating.
  19. Barton, Roger W.; Nystrom, Michael J.; Mackey, Bob L.; Pan, Lawrence S.; Pei, Shiyou; Wallace, Stephen; Smith, Douglas M., Fabricating of a flat-panel displace using porous spacer.
  20. Barton,Roger W.; Narayanan,Kollengode S.; Mackey,Bob L.; Macaulay,John M.; Hopple,George B.; Schropp, Jr.,Donald R.; Nystrom,Michael J.; Gopalakrishnan,Sudhakar; Pei,Shiyou; Xu,Xueping, Fabrication of flat-panel display having spacer with rough face for inhibiting secondary electron escape.
  21. Ahn, Kie Y.; Forbes, Leonard, Field emission display having porous silicon dioxide layer.
  22. Ahn, Kie Y.; Forbes, Leonard, Field emission display having reduced power requirements and method.
  23. Ahn,Kie Y.; Forbes,Leonard, Field emission display having reduced power requirements and method.
  24. Barton, Roger W.; Narayanan, Kollengode S.; Mackey, Bob L.; Macaulay, John M.; Hopple, George B.; Schropp, Jr., Donald R.; Nystrom, Michael J.; Gopalakrishnan, Sudhakar; Pei, Shiyou; Xu, Xueping, Flat-panel display having spacer with rough face for inhibiting secondary electron escape.
  25. Havemann Robert H. ; Jeng Shin-Puu ; Gnade Bruce E. ; Cho Chih-Chen, Interconnect structure with an integrated low density dielectric.
  26. Gnade Bruce E. ; Cho Chih-Chen ; Smith Douglas M., Low dielectric constant material for electronics applications.
  27. Ayers, Michael Raymond, Low dielectric constant materials prepared from soluble fullerene clusters.
  28. Ree,Moonhor; Oh,Weontae; Hwang,Yong Taek; Lee,Byeongdu, Low dielectric organosilicate polymer composite.
  29. Douglas M. Smith ; Gregory P. Johnston ; William C. Ackerman ; Richard A. Stoltz ; Alok Maskara ; Teresa Ramos ; Shin-Puu Jeng ; Bruce E. Gnade, Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates.
  30. Smith, Douglas M.; Johnston, Gregory P.; Ackerman, William C.; Stoltz, Richard A.; Maskara, Alok; Ramos, Teresa; Jeng, Shin-Puu; Gnade, Bruce E., Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates.
  31. Ahn, Kie Y.; Forbes, Leonard, Manufacturing method of a field emission display having porous silicon dioxide insulating layer.
  32. Lee James C. (Plymouth MN), Method for applying optical interference coating.
  33. Yang, Tahorng, Method for forming low dielectric constant insulating layer with foamed structure.
  34. Gnade Bruce E. ; Cho Chih-Chen ; Smith Douglas M., Method of making a low dielectric constant material for electronics.
  35. Ayers Michael Raymond, Method of making fullerene-decorated nanoparticles and their use as a low dielectric constant material for semiconductor devices.
  36. Ayers Michael R., Method of making two-component nanospheres and their use as a low dielectric constant material for semiconductor device.
  37. Aoi Nobuo,JPX ; Sugahara Gaku,JPX, Method of manufacturing semiconductor device.
  38. Farnworth,Warren M.; Jiang,Tongbi, Methods for forming porous insulator structures on semiconductor devices.
  39. Farnworth,Warren M.; Jiang,Tongbi, Methods for forming porous insulators from "void" creating materials and structures and semiconductor devices including same.
  40. Lee Hong-Ji,TWX ; Jeng David Guang-Kai,TWX, Methods for reducing a dielectric constant of a dielectric film and for forming a low dielectric constant porous film.
  41. Havemann Robert H. (Garland TX) Jeng Shin-puu (Plano TX), Multilevel interconnect structure with air gaps formed between metal leads.
  42. Havemann Robert H. ; Jeng Shin-puu, Multilevel interconnect structure with air gaps formed between metal leads.
  43. Smith Douglas M. ; Johnston Gregory P. ; Ackerman William C. ; Jeng Shin-Puu, Nanoporous dielectric thin film formation using a post-deposition catalyst.
  44. Jeng Shin-Puu (Plano TX), Planarized multi-level interconnect scheme with embedded low-dielectric constant insulators.
  45. Jeng Shin-Puu (Plano TX), Planarizeed multi-level interconnect scheme with embedded low-dielectric constant insulators.
  46. Smith, Douglas M.; Ackerman, William C.; Stoltz, Richard A., Polyol-based method for forming thin film aerogels on semiconductor substrates.
  47. Ayers, Michael, Porous films and bodies with enhanced mechanical strength.
  48. Ayers, Michael Raymond, Porous films and bodies with enhanced mechanical strength.
  49. Ayers, Michael Raymond, Porous inorganic solids for use as low dielectric constant materials.
  50. Ayers, Michael Raymond, Porous materials derived from polymer composites.
  51. Cooney, III, Edward C.; McGahay, Vincent; Shaw, Thomas M.; Stamper, Anthony K.; Colburn, Matthew E., Process for interfacial adhesion in laminate structures through patterned roughing of a surface.
  52. Cooney, III,Edward C.; McGahay,Vincent; Shaw,Thomas M; Stamper,Anthony K.; Colburn,Matthew E., Process for interfacial adhesion in laminate structures through patterned roughing of a surface.
  53. Varaprasad, Desaraju V.; Dornan, Craig A.; Getz, Catherine A., Processes for forming a faceplate having a transparent substrate with diffuser surface.
  54. Desaraju V. Varaprasad ; Craig A. Dornan ; Catherine A. Getz, Processes for forming transparent substrate with diffuser surface.
  55. He, Liu; Park, Sung-Soon; Zheng, Haixing; Tang, Grace; Vance, Aylin, Radiation-curable anti-reflective coating system.
  56. Farnworth,Warren M.; Jiang,Tongbi, Semiconductor devices and other electronic components including porous insulators created from "void" creating materials.
  57. Farnworth, Warren M.; Jiang, Tongbi, Semiconductor devices including porous insulators.
  58. Farnworth, Warren M.; Jiang, Tongbi, Semiconductor devices including porous insulators.
  59. Abedrabbo, Sufian; Fiory, Anthony Thomas, Semiconductor optical emission device.
  60. Lih-Ping Li TW; Li-Mei Chen TW; Chao-Jen Wang TW; Hsin-Hsen Lu TW, Sol materials.
  61. Ashley Carol S. (Albuquerque NM) Reed Scott T. (Albuquerque NM), Sol-gel antireflective coating on plastics.
  62. Ashley Carol S. (Albuquerque NM) Reed Scott T. (Albuquerque NM), Sol-gel antireflective coating on plastics.
  63. Wicks George G. (Aiken SC) Livingston Ronald R. (Aiken SC) Baylor Lewis C. (North Augusta SC) Whitaker Michael J. (North Augusta SC) O\Rourke Patrick E. (Martinez GA), Tetraethyl orthosilicate-based glass composition and method.
  64. Varaprasad Desaraju V. ; Dornan Craig A. ; Getz Catherine A., Transparent substrate with diffuser surface.
  65. Varaprasad Desaraju V. ; Dornan Craig A. ; Getz Catherine A., Transparent substrate with diffuser surface.
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