[특허]Table device

[미국특허] Table device 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G05B-011/00
출원번호	US-0792885 (1985-10-30)
우선권정보	JP-0227739 (1984-10-31)
발명자 / 주소	Hirai Hiromu (Yatabe JPX) Yamaguchi Takashi (Chiyoda JPX) Takase Fuyuto (Chiyoda JPX) Yoshida Tomomasa (Mito JPX)
출원인 / 주소	Hitachi, Ltd. (Tokyo JPX 03)
인용정보	피인용 횟수 : 65 인용 특허 : 0

초록 ▼

A first table is provided on a fixed base so that the first table can be moved in one of two directions which cross each other at right angles. A second table is provided on the first table so that the second table can be moved in the other direction. Linear motors for applying the driving force to the first and second tables to directly drive these tables are provided between the fixed base and first table and between the first and second tables.

대표청구항 ▼

A table device having a first table provided on a fixed base so that said first table can be moved in one of two directions which cross each other at right angles, and a second table provided on said first table so that said second table can be moved in the other direction, characterized in that driving means for applying the driving force to said first and second tables consist of linear motors provided between the upper surface of said fixed base and said first table and between the upper surface of said first table and the lower surface of said second table, respectively, said linear motors including movable coils and permanent magnets, said movable coils of said linear motors being provided on the central portions of the lower surfaces of said first and second tables so that said linear motors extend in the directions of movements thereof, said permanent magnets in said linear motors being attached to yokes provided on the upper surfaces of said fixed base and said first table.

이 특허를 인용한 특허 (65) 인용/피인용 타임라인 분석

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Ebihara Akimitsu,JPX ; Novak Thomas, Electromagnetic alignment and scanning apparatus.
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Ebihara Akimitsu,JPX ; Novak Thomas, Electromagnetic alignment and scanning apparatus.
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Ebihara Akimitsu,JPX ; Novak Thomas, Electromagnetic alignment and scanning apparatus.
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Ebihara, Akimitsu; Novak, Thomas, Electromagnetic alignment and scanning apparatus.
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Ebihara,Akimitsu; Novak,Thomas, Electromagnetic alignment and scanning apparatus.
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Lee Martin E., Exposure apparatus and method utilizing isolated reaction frame.
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Lee, Martin E., Exposure apparatus and method utilizing isolated reaction frame.
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Lee Martin E., Exposure apparatus having dynamically isolated reaction frame.
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Lee Martin E., Exposure apparatus having dynamically isolated reaction frame.
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Lee Martin E., Exposure apparatus having dynamically isolated reaction frame.
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Lee Martin E., Exposure apparatus having dynamically isolated support structure.
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Lee Martin E., Exposure apparatus having reaction frame.
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Lee Martin E., Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame.
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Lee Martin E., Exposure method, and method of making exposure apparatus having dynamically isolated reaction frame.
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Lee Martin E., Exposure method, and method of making exposure apparatus having dynamically isolated support structure.
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Lee Martin E., Guideless stage with isolated reaction frame.
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Lee, Martin E., Guideless stage with isolated reaction stage.
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Takahashi Hajime (Tokyo JPX) Saito Mitsuhiko (Tokyo JPX) Shimada Yoshihiro (Tokyo JPX), Linear DC motor driving device.
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Inoue Atsushi (Nara JPX), Linear driving device for use of a copying apparatus.
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Miyata, Koji, Linear motor.
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Chitavat Anwar (P.O. Box 107 Northport NY 11768), Linear motor with air-lift bearing unloading.
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Chitayat Anwar (Duck Island ; P.O. Box 107 Northport NY 11768), Linear motor with magnetic bearing preload.
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Teramachi Hiroshi (2-34-8 Higashi-Tamagawa ; Setagaya-Ku ; Tokyo JPX), Linear motor-driven X-Y table.
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Lee Martin E., Lithography apparatus with movable stage and mechanical isolation of stage drive.
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Lee Martin E., Method for making and operating an exposure apparatus having a reaction frame.
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Lee Martin E., Method for making apparatus with dynamic support structure isolation and exposure method.
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Lee Martin E., Method of making exposure apparatus with dynamically isolated reaction frame.
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Lee, Martin E., Method of making exposure apparatus with dynamically isolated reaction frame.
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Widdowson, Gary Peter; Liao, You Yong; Ou, Gang; Gaunekar, Ajit S., Motor system for positioning a load.
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Brooker, Jeffrey S.; Chaves, Paulo; Dhese, Keith; Eddington, Robin, Motorized stage.
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Totakura Nagabhushanam (North Haven CT) Shalaby Shalaby W. (Anderson SC), Polymeric composition.
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Kita, Toshiki, Positioning device and positioning method.
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Lee, Martin E., Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device.
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Lee,Martin E., Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device.
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Lee,Martin E., Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device.
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van Engelen, Gerard; van Dijk, Cornelis D.; van Kimmenade, Johannes M. M.; van Eijk, Jan, Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device.
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Zheng, Zhang-Yong; Zhang, Ju-Yuan; Lu, Xin; Wong, Shih-Fang, Positioning machine.
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Novak, W. Thomas; Kovalerchik, Michael, Positioning stage with stationary actuators.
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Novak W. Thomas (Hillsborough CA) Premji Zahirudeen (Boulder CO) Nayak Uday G. (San Jose CA) Ebihara Akimitsu (San Mateo CA), Precision motion stage with single guide beam and follower stage.
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Novak W. Thomas ; Premji Zahirudeen ; Nayak Uday G. ; Ebihara Akimitsu, Precision motion stage with single guide beam and follower stage.
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W. Thomas Novak ; Zahirudeen Premji ; Uday G. Nayak ; Akimitsu Ebihara, Precision scanning apparatus and method with fixed and movable guide members.
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Shimodaira Yoshikazu (Tokorozawa JPX) Nozawa Teruo (Hanno JPX), Speed control system.
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Kyomasu, Ryuichi; Urabayashi, Hiroto; Torihata, Minoru; Takahashi, Kuniyuki; Miyahara, Toshimichi, XY table for a semiconductor manufacturing apparatus.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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[미국특허] Table device 원문보기