초록 ▼

The present invention is directed to method and apparatus for figuring a surface by plasma assisted chemical transport by means of mounting the surface to be processed on at least one electrode of an R.F. driven reactor having two parallel plate electrodes; passing reactive gas through the reactor t

The present invention is directed to method and apparatus for figuring a surface by plasma assisted chemical transport by means of mounting the surface to be processed on at least one electrode of an R.F. driven reactor having two parallel plate electrodes; passing reactive gas through the reactor to establish gas discharge by the R.F. power; while controlling the ion energies of the reactive gas; and while controlling the removal rate of different areas of the surface by using a substantially smaller surface area electrode than said surface area so that varying the amount of time the small surface area electrode spends at each region shapes the surface. According to one aspect of the invention optical measurement of said surface is affected in quasi real time.

대표청구항 ▼

A process for figuring a surface by plasma assisted chemical transport comprising the steps of: mounting the surface to be processed on at least one electrode of an R.F. driven reactor having two substantially parallel plate electrodes; passing reactive gas through said reactor to establish gas disc

A process for figuring a surface by plasma assisted chemical transport comprising the steps of: mounting the surface to be processed on at least one electrode of an R.F. driven reactor having two substantially parallel plate electrodes; passing reactive gas through said reactor to establish gas discharge by the R.F. power to thereby break down said reactive gas into ions, electrons and neutral atoms or molecules; while controlling the ion energies of said ions; and while controlling the removal rate of different areas of said surface to be processed by using a substantially smaller surface area electrode than said surface to be processed so that varying the amount of time said substantially smaller surface area electrode spends at each different area shapes the surface to be processed.