초록 ▼

The foreign particle detecting method and apparatus are disclosed wherein a polarized laser beam emitted by a laser beam irradiating system from a direction inclined with respect to the direction perpendicular to the surface of a substrate is used by a scanning means to linearly scan the substrate s

The foreign particle detecting method and apparatus are disclosed wherein a polarized laser beam emitted by a laser beam irradiating system from a direction inclined with respect to the direction perpendicular to the surface of a substrate is used by a scanning means to linearly scan the substrate surface from a direction approximately 90°with respect to the laser light irradiating direction; and the laser light reflected from a foreign particle on the substrate surface is detected by a polarized light analyzer and a photoelectric conversion device from a direction set approximately equal to said scanning direction and inclined with respect to the direction perpendicular to the substrate surface.

대표청구항 ▼

A foreign particle detecting method comprising the steps of: irradiating two halves of a substrate having a frame with a pellicle mounted thereon with a respective laser beam emitted by a laser beam irradiating means in a direction inclined with respect to the substrate surface and polarized thereaf

A foreign particle detecting method comprising the steps of: irradiating two halves of a substrate having a frame with a pellicle mounted thereon with a respective laser beam emitted by a laser beam irradiating means in a direction inclined with respect to the substrate surface and polarized thereafter so as to scan respective halves of the substrate surface in a predetermined direction while linearly moving said substrate in a direction crossing at substantially right angles to the light scanning direction; positioning, at least prior to the step of irradiating, a respective polarized-light analyzer in said scanning direction inclined with respect to said substrate surface for analyzing the scattered light from a foreign particle on respective halves of the substrate; and detecting said scattered light by a photo-electric conversion means; whereby the entirety of the substrate is enabled to be inspected for detection of foreign particles irrespective of the frame and pellicle mounted on the substrate.