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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
---|---|
국제특허분류(IPC7판) |
|
출원번호 | US-0797793 (1985-11-14) |
발명자 / 주소 |
|
출원인 / 주소 |
|
인용정보 | 피인용 횟수 : 10 인용 특허 : 2 |
A multi-stage valve having a valve housing containing an inlet port and an outlet port that communicate through means of an elongated chamber formed in the housing. An outer sealing unit is mounted in the chamber and is adapted to close in sealing contact against one of the ports. A control orifice
In a vacuum system wherein a vacuum chamber is connected to a pump for placing the chamber at a first high vacuum, and to a gas source for adding a selected gas into the chamber to place chamber at a second rough vacuum, the chamber pressure at the first high vacuum being less than that at the secon
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