초록 ▼

Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing stat

Disclosed is a manipulator for removing a cassette holding articles, such as semiconductor wafers, to be processed from a container supported on a processing station in a standard mechanical interface (SMIF) system. The container is supported on an interface port on the canopy of the processing station. A first platform is transportable along a shaft below the interface port. The platform is operable to mate with the interface port and receive the cassette from the container. The first platform is transported down the shaft, thereby removing the cassette from the container. An arm orthogonal to the shaft and mounted in the shaft supports a pivoting arm which swings to engage the cassette on the first platform and support the cassette off of the first platform. The pivoting arm pivots to transport the cassette to a location away from the shaft. The first platform is then transported back up the shaft to the interface port to seal the container to prevent particulate contamination. The pivot arm then pivots to swing the cassette to a host elevator which is located in alignment with the shaft below the first platform.

대표청구항 ▼

An apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has a cassette port for receiving the cassette when the cassette moves along a central axis extending from outside the processing station,

An apparatus for transferring a cassette holding articles to be processed to and from a container supported at a processing station where the processing station has a cassette port for receiving the cassette when the cassette moves along a central axis extending from outside the processing station, through the cassette port, and into the processing station, said apparatus comprising: platform means including a platform transportable substantially along the central axis for transferring the cassette to and from the container substantially along the central axis, the platform means including a first side and a second side, the cassette being supportable on the first side; manipulator means including a first arm extending substantially orthogonal to the central axis, the first arm including a first end and a second end; means, mounted adjacent to the first end of the first arm, for controlling the axial position of the first arm relative to the central axis; a pivoting arm including a pivoting end and an engaging end, the pivoting end mounted pivotally adjacent to the second end of the first arm, the pivoting arm operable to pivot about a pivot axis extending substantially through the pivoting end and substantially perpendicular to the central axis; engaging means mounted on said engaging end of the pivoting arm for engaging the cassette; means for controlling the axial position of the platform relative the central axis; and means for controlling the rotational position of the pivoting arm.