초록 ▼

Methods and apparatus for transferring workpieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are incrementally lowered as the individual workpieces are removed from one cassette and delivered to the other

Methods and apparatus for transferring workpieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are incrementally lowered as the individual workpieces are removed from one cassette and delivered to the other cassette. Such indexing of the cassettes is achieved by a single elevator mechanism adapted to support both of the cassettes such that they are vertically and horizontally offset relative to each other.

대표청구항 ▼

Apparatus for transferring workpieces from a first cassette to a second cassette, said first and second cassettes being adapted to store workpieces one above the other, said apparatus comprising unloading means movable between a retracted position and an extended position for successively unloading

Apparatus for transferring workpieces from a first cassette to a second cassette, said first and second cassettes being adapted to store workpieces one above the other, said apparatus comprising unloading means movable between a retracted position and an extended position for successively unloading workpieces from said first cassette, loading means movable between a retracted position and an extended position for successively loading said workpieces into said second cassette, means for intermediately supporting and transferring unloading workpieces between said unloading means and said loading means, and indexing means for simultaneously and conjointly indexing said first and second cassettes in a common direction such that, after said unloading means has unloaded a first workpiece from said first cassette, said first cassette is indexed to a position in which a second workpiece can be unloaded therefrom and said second cassette is indexed to a position in which said first workpiece can be loaded thereinto, said indexing means including a first platform supporting said first cassette and a second platform supporting said second cassette, said first cassette horizontally offset relative to said second cassette, wherein said unloading means when in its said retracted position is positioned underneath said workpieces in said first cassette, and said loading means when in its said retracted position is positioned clear of said workpieces in said second cassette, whereby said unloading means when in its said retracted position engages one of said workpieces in said first cassette upon indexing thereof, and said loading means when in its said retracted position is clear of said workpieces in said second cassette upon indexing thereof.