초록 ▼

A pressure sense recognition control system having at least one pressure sensor module for detecting the two-dimensional distribution of the component forces in the three directions in the rectangular coordinate system of a force applied to the pressure receiving surface of the pressure sensor modul

A pressure sense recognition control system having at least one pressure sensor module for detecting the two-dimensional distribution of the component forces in the three directions in the rectangular coordinate system of a force applied to the pressure receiving surface of the pressure sensor modules. The pressure sensor module has at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, and a plurality of diffusion type strain gauges provided on the surfaces of the pressure sensing member which are substantially perpendicular to the pressure receiving surface and for detecting the three component forces applied to the pressure surfaces in response to the changes of an output of a bridge composed of the strain gauges. These members are mounted on an object, the drive of which is to be controlled. The detection signals derived from the pressure sensor module are processed and converted into pressure sense detection data corresponding to the pressure surfaces for each of the component forces. The data is further processed to produce pressure sense recognition data. Data for controlling the drive of the object is obtained from the pressure sense recognition data.

대표청구항 ▼

A pressure sense recognition control system for controlling the driving of an object, said system comprising: pressure detection means mounted on the object for detecting the distribution, in a plane, of the components of a force in three selected directions of a rectangular coordinate system, said

A pressure sense recognition control system for controlling the driving of an object, said system comprising: pressure detection means mounted on the object for detecting the distribution, in a plane, of the components of a force in three selected directions of a rectangular coordinate system, said detection means including a plurality of pressure sensor modules, each said module having at least one pressure sensor cell having a pressure sensing member made of single crystal silicon, said pressure sensing member having a pressure receiving surface lying in the plane for receiving the force, and a plurality of diffusion type strain gauges provided on at least one surface of said pressure sensing member which is substantially perpendicular to said pressure receiving surface for detecting the three force components in the three directions applied to said pressure receiving surface, said strain gauges being electrically connected to constitute at least one bridge circuit for producing detection signals indicative of the amplitude of the three force components; signal processing and storing means for deriving the detection signals from said pressure detection means sequentially, for converting said detection signals into pressure sense detection data, and for storing the converted pressure sense detection data corresponding to each said pressure receiving surface for each of said component forces in the three directions; primary arithmetic operation and storage means for processing said pressure detection data derived from said signal processing and storing meansin accordance with a predetermined basic arithmetic/logic operation algorithm to obtain basic pressure data and for storing said basic pressure data; secondary arithmetic operation and storage means for processing said basic pressure data read out from said primary arithmetic operation and storage means and said pressure sense detection data read from said signal processing and storing means in accordance with a predetermined pressure recognition algorithm to obtain pressure sense recognition data and for storing said pressure recognition data; tertiary arithmetic operation and storage means responsive to command data from an external control means for controlling the drive of said object for processing said pressure sense detection data read out from said signal processing and storing means, said basic pressure data read out from said primary arithmetic operation and storage means and said pressure sense recognition data read out from said secondary arithmetic operation and storage means in accordance with a predetermined control algorithm to obtain control data required to control the drive of the object and for outputting said control data to the external control means; and data communication means for communicating data between said tertiary arithmetic operation and storage means and the external control means.