초록 ▼

Apparatus for sputter coating a disc comprises an evacuable chamber with a disc entry and exit opening. A disc to be coated is supported at the center of the disc by support means and drive means move the support means along a disc path between a disc loading position outside the chamber and a disc

Apparatus for sputter coating a disc comprises an evacuable chamber with a disc entry and exit opening. A disc to be coated is supported at the center of the disc by support means and drive means move the support means along a disc path between a disc loading position outside the chamber and a disc coating position within the chamber. Inside the chamber are two pivotally mounted cathodes each having coating material to be sputtered applied to a surface thereof. The cathodes are mounted to pivot between the withdrawn position lying clear of the disc path and operating position wherein the cathodes lie one to each side of the disc when this is in the coating position. Means are provided for rotating the support means and thus the disc about the disc center when in the coating position and during such rotation coating material is sputtered from the cathodes simultaneously onto both sides of the disc.

대표청구항 ▼

Apparatus for sputter coating a substrate in the form of a disc, comprising an evacuable chamber having a disc entry and an exit opening, support means for supporting said disc at the center thereof, drive means for driving said support means to move said disc along a disc path between a disc loadin

Apparatus for sputter coating a substrate in the form of a disc, comprising an evacuable chamber having a disc entry and an exit opening, support means for supporting said disc at the center thereof, drive means for driving said support means to move said disc along a disc path between a disc loading position outside said chamber and a disc coating position within said chamber, a pair of cathodes each having coating material to be sputtered applied to a surface thereof, pivot means mounting said cathodes within said chamber for pivotal movement between withdrawn positions lying clear of said disc path and operating positions wherein said cathodes lie one to each side of said disc when in said coating position, and rotary means for rotating said disc about the center thereof when in said coating position, whereby coating material is sputtered simultaneously onto both sides of said disc as said disc is rotated in said coating position with said cathodes in said operating positions.