초록 ▼

Apparatus for handling gaseous streams comprising modular flow block means, including a plurality of gas flow paths extending through said modular flow block means so as to provide a plurality of port members on respective surfaces of said modular flow block means, a plurality of valve passages exte

Apparatus for handling gaseous streams comprising modular flow block means, including a plurality of gas flow paths extending through said modular flow block means so as to provide a plurality of port members on respective surfaces of said modular flow block means, a plurality of valve passages extending into said modular flow block means so as to intercept said gas flow paths at predetermined locations throughout said modular flow block means, each of said plurality of valve passages including an entrance aperture on a respective surface of said modular flow block means, a plurality of valve flange members, each of said valve flange members being adapted to mount a high vacuum valve on said modular flow block means at one of said entrance apertures without the need to apply rotational force to said valve flange members, so as to removably, hermetically seal said high vacuum valve onto said modular flow block means, and each of said plurality of port members including port member mounting means whereby conduits can be removably, hermetically sealed to said respective plurality of port members.

대표청구항 ▼

Apparatus for handling gaseous streams comprising a unitary modular flow block including a first valve passage extending into said modular flow block, said first valve passage including a first valve entrance aperture and a first valve seat, whereby a first valve including a reciprocating valve shaf

Apparatus for handling gaseous streams comprising a unitary modular flow block including a first valve passage extending into said modular flow block, said first valve passage including a first valve entrance aperture and a first valve seat, whereby a first valve including a reciprocating valve shaft mounted in said first valve passage can selectively open and close said first valve seat, a second valve passage extending into said modular flow block, said second valve passage including a second valve entrance aperture and a second valve seat, whereby a second valve including a reciprocating valve shaft mounted in said second valve passage can selectively open and close said second valve seat, a first gas flow path extending through said modular flow block along a first predetermined path which includes a portion connecting said first valve seat with said second valve passage at a predetermined location between said second valve seat and said second valve entrance aperture, and a second gas flow path extending through said modular flow block along a second predetermined path which includes said second valve seat, whereby closing of said first valve seat closes said first gas flow path and closing of said second valve seat closes said second gas flow path, while a gas flowing through said first gas flow path can flush said predetermined location in said second valve passage even when said second valve seat has been closed and flushing of said second valve seat can be controlled by said first valve.