[특허]Optical beam integration system

Optical beam integration system 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G02B-027/00
출원번호	US-0822363 (1986-01-24)
발명자 / 주소	Fahlen Theodore S. (San Jose CA) Hutchison Sheldon B. (Santa Clara CA) McNulty Timothy (San Jose CA)
출원인 / 주소	XMR, Inc. (Santa Clara CA 02)
인용정보	피인용 횟수 : 98 인용 특허 : 0

초록 ▼

An improved optical beam integration system for homogenizing a nonuniform radiant energy beam having a nonuniform beam intensity profile characteristic. The optical beam integration system comprises a first crossed lenticular cylindrical lens structure, a second crossed lenticular cylindrical lens structure, and a focusing lens interposed between a radiant energy source and an image or work plane. The nonuniform radiant energy beam from the radiant energy source refracts sequentially through the first and second crossed lenticular cylindrical lens structures and the focusing lens so as to produce a homogenized beam which forms an image in the work plane. The work plane is at a constant distance from the optical beam integration system. Preferably, the optical beam integration system is adjustable for selectively setting the size of the image produced by the homogenized beam in the work plane. The optical beam integration system is also preferably adjustable so that the aspect ratio of the image produced by the homogenized beam in the work plane can be selectively set. As a result, the effectiveness and flexibility of semiconductor processing by means of an ultraviolet excimer laser, for example, are substantially improved.

대표청구항 ▼

An optical beam integration system responsive to an input beam of radiant energy from a radiant energy source, the input beam having a nonuniform beam intensity profile characteristic, comprising: a first crossed lenticular cylindrical lens means having a first predetermined focal length and aligned in a plane substantially orthogonal to the input beam; a second crossed lenticular cylindrical lens means having a second predetermined focal length and positioned at a distance from the first crossed lenticular cylindrical lens means and on an opposite side of the first crossed lenticular cylindrical lens means from the source, the second crossed lenticular cylindrical lens means being aligned in a plane substantially orthogonal to the input beam and in a plane parallel to the plane of the first crossed lenticular cylindrical lens means; and a focusing lens having a preselected focal length and interposed between the second crossed lenticular cylindrical lens means and a work plane at a separation from the work plane; the input beam refracting sequentially through the first and second crossed lenticular cylindrical lens means and the focusing lens onto the work plane; whereby the input beam is homogenized so as to produce an image in the work plane having a relatively uniform intensity profile characteristic.

이 특허를 인용한 특허 (98)

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Optical beam integration system 원문보기

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