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Radial gas manifold 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-011/10
  • F16K-049/00
출원번호 US-0034615 (1987-04-06)
발명자 / 주소
  • DeMild
  • Jr. Leonard C. (Peabody MA)
출원인 / 주소
  • Spire Corporation (Bedford MA 02)
인용정보 피인용 횟수 : 42  인용 특허 : 0

초록

An improved radially designed gas manifold is disclosed for the precise mixing and admission of a plurality of gases into a processing chamber, and being characterized by rapid switching from one gas to another or from one set of gas mixture to another set of gas mixture, and yet occupying a minimum

대표청구항

A radial gas manifold comprising: (a) a body provided with a mixing channel therethrough; (b) a plurality of gas conduits formed in said body in parallel spaced relation to said mixing channel; (c) a radial passage connecting each of said plurality of gas conduits to said mixing channel; (d) a first

이 특허를 인용한 특허 (42)

  1. Murphy, Michael; Hoffman, Richard; Cruel, Jonathan; Kadinski, Lev; Ramer, Jeffrey C.; Armour, Eric A., Alkyl push flow for vertical flow rotating disk reactors.
  2. Truong Quoc ; Yousif Imad ; Lim Vincente ; Bercaw Craig, Apparatus and methods for controlling process chamber pressure.
  3. Browne Ronnie (Derry NH), Compact manifold valve.
  4. Mitrovic, Bojan; Gurary, Alex; Quinn, William; Armour, Eric A., Density-matching alkyl push flow for vertical flow rotating disk reactors.
  5. Mitrovic, Bojan; Gurary, Alexander I.; Quinn, William E.; Armour, Eric A., Density-matching alkyl push flow for vertical flow rotating disk reactors.
  6. Dalton, Jr., Richard L.; Weickel, Scott A., Dispensing valve with back flow protection.
  7. Buchko, Raymond G., Dual actuator cylinder assembly.
  8. Kennedy, Chandler James, Electro-opto switching of unpolarized lasers.
  9. Ohmi Tadahiro,JPX ; Hirao Keiji,JPX ; Minami Yukio,JPX ; Yamaji Michio,JPX ; Hirose Takashi,JPX ; Ikeda Nobukazu,JPX, Fluid control device.
  10. Ohmi Tadahiro,JPX ; Hirao Keiji,JPX ; Minami Yukio,JPX ; Yamaji Michio,JPX ; Hirose Takashi,JPX ; Ikeda Nobukazu,JPX, Fluid control device.
  11. Tadahiro Ohmi JP; Yukio Minami JP; Akihiro Morimoto JP; Nobukazu Ikeda JP; Keiji Hirao JP; Takashi Hirose JP; Michio Yamaji JP; Kazuhiro Yoshikawa JP, Fluid control device.
  12. Ohmi Tadahiro,JPX ; Yamaji Michio,JPX ; Ikeda Nobukazu,JPX ; Morokoshi Hiroshi,JPX, Fluid control system and valve to be used therein.
  13. Johnson, Kenneth Alan, Fluid handling port array.
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  16. Yokogi Kazuo,JPX, Gas supply system equipped with cylinders.
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  19. Kennedy,Chandler James, Laser power reduction without mode change.
  20. Tzu, Gwo-Chuan; Umotoy, Salvador P., Lid assembly for a processing system to facilitate sequential deposition techniques.
  21. Jarrett, Mark J.; Mallison, Edgar R., Manifold for processing a stacked array of laser block assemblies.
  22. Smith Loren C., Method and apparatus for maintaining a constant ratio of gases in a mixture subject to steady state and intermittent flow conditions.
  23. Yuuki Akimasa,JPX ; Kawahara Takaaki,JPX ; Tsutahara Kouitirou,JPX ; Yamaguchi Touru,JPX, Method of uniform CVD.
  24. Eidsmore, Paul E., Modular surface mount manifold.
  25. Eidsmore, Paul E., Modular surface mount manifold.
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  29. Eidsmore, Paul G.; Mohlenkamp, Michael J.; Olechnowicz, Benjamin J.; Schilt Deines, Christine M.; Nordstrom, Douglas; McCoy, James, Modular surface mount manifold assemblies.
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  32. Ohmi Tadahiro (Sendai JPX) Sugiyawa Kazuhiko (Sendai JPX) Nakahara Fumio (Sendai JPX) Umeda Masaru (Tokyo JPX), Process gas supply piping system.
  33. Kedar Haim, Reaction vessel agitation apparatus.
  34. Miller, Matthew W.; Basceri, Cem, Reactors, systems and methods for depositing thin films onto microfeature workpieces.
  35. Adachi ; Jr. Richard S. ; Le An, System and method for providing an integrated gas stick.
  36. Evans Bryce ; Rebenne Helen E., Ultra high purity gas distribution component with integral valved coupling and methods for its use.
  37. Evans Bryce ; Rebenne Helen E., Ultra high purity gas distribution component with integral valved coupling and methods for its use.
  38. Ku,Vincent W.; Chen,Ling; Wu,Dien Yeh, Valve design and configuration for fast delivery system.
  39. Ku,Vincent W.; Chen,Ling; Wu,Dien Yeh, Valve design and configuration for fast delivery system.
  40. Evans Bryce ; Rebenne Helen E. ; Collins Joshua ; Rogers Russell L., Valved coupling for ultra high purtiy gas distribution system.
  41. DuRoss Ronald R. (Huntsville AL) Tucker William K. (Cherry Hill NJ), Zero dead-leg gas control apparatus and method.
  42. DuRoss Ronald R. ; Tucker William K., Zero dead-leg valve structure.
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