[특허]Resonant sensor and method of making same

Resonant sensor and method of making same 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-021/306 B44C-001/22 C03C-015/00 C23F-001/02
출원번호	US-0743255 (1985-06-11)
발명자 / 주소	Chitty Gordon W. (Norfolk MA) Morrison Jr. Richard H. (Taunton MA) Olsen Everett O. (Wrentham MA) Panagou John G. (Attleboro MA) Zavracky Paul M. (Norwood MA)
출원인 / 주소	The Foxboro Company (Foxboro MA 02)
인용정보	피인용 횟수 : 61 인용 특허 : 0

초록 ▼

Microminiature resonant sensor structures are prepared according to micromachining/microfabrication techniques, which structures include thin-film deposits of piezoelectric materials. Such piezoelectric deposits may be excited electrically by including metallized conductive paths during fabrication, or optically. The resonant frequency of the sensor structure is varied by subjecting it to a physical variable, or measurand, such as pressure, temperature, flow rate, etc. Similarly, the resonant frequency of the devices may be detected electrically or optically. The microminiature resonant structures include ribbons and wires, hollow beam and cantilevered hollow beams, and single- and double-ended double beam resonant structures such as tuning forks.

대표청구항 ▼

A method of fabricating a laminar resonant structure, comprising the steps of: (a) preparing a substrate workpiece; (b) securing a laminar material to said substrate; (c) cleaning the exposed laminar material surface; (d) patterning a first resist on the laminar material surface; (e) descumming the resist; (f) etching the workpiece to form a resonant structure on the substrate; (g) cleaning and baking the workpiece; (h) depositing a piezoelectric layer on the workpiece surface; (i) patterning and etching the piezoelectric layer to form a piezoelectric slab: (j) cleaning and rinsing the workpiece; (k) applying an insulation layer on the workpiece surface and patterning same; (l) depositing a conductive metallization layer on the workpiece surface and patterning and etching same; (m) removing the resonant structure from the substrate.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
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Resonant sensor and method of making same 원문보기

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Resonant sensor and method of making same 원문보기

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