초록 ▼

In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is journaled for movement about a vertical axis on the top of the coating chamber. The ends of the swiveli

In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is journaled for movement about a vertical axis on the top of the coating chamber. The ends of the swiveling arm have jacks bearing workpiece holding plates which transport the workpiece to an opening in the coating chamber. The workpiece holders are adapted to close off the opening from above. A turntable which can swivel about a vertical axis in the interior of the coating chamber has recesses on its top side for accommodating the workpieces. Lifting plates are journaled in these recesses and can be raised and lowered by lifting means in the bottom plate. The lifting plates are constructed such that, with the turntable in a first position, they pick up the workpieces in the area of the opening and at the same time close off the bottom of the opening, and in a second position they raise the workpieces into the range of action of a cathode.

대표청구항 ▼

Apparatus for passing a substantially flat workpiece into and out of an evacuated coating chamber through a lock, and for moving and turning the workpiece into and out of the range of a coating source for the purpose of treating the workpiece surface, characterized by a coating system disposed in th

Apparatus for passing a substantially flat workpiece into and out of an evacuated coating chamber through a lock, and for moving and turning the workpiece into and out of the range of a coating source for the purpose of treating the workpiece surface, characterized by a coating system disposed in the area of the coating chamber and having one or more cap-like workpiece holder means for bringing the workpieces into a position, adjacent an opening in a cover of the coating chamber, and for closing the opening on one side, a lifting plate means held and guided on a turntable rotatably mounted within the coating chamber for the closing the other side of the opening, the workpiece holder means being able to be pressed against the opening in the cover of the coating chamber by a jack supported on the loading device, and the lifting plate means being able to be pressed against the opening by a lifting means fastened to a bottom plate.