초록 ▼

A compliant sealing material with low or no gas permeability and low spring rate is made by coating a metal such as gold, on the surface of a polymer sheet. The metal acts as a complete gas barrier on an atomic level, and the polymer provides structural integrity and mounting attributes without detr

A compliant sealing material with low or no gas permeability and low spring rate is made by coating a metal such as gold, on the surface of a polymer sheet. The metal acts as a complete gas barrier on an atomic level, and the polymer provides structural integrity and mounting attributes without detrimentally increasing compliance. A small number of metal atoms injected at a moderate energy into the near surface of the polymer act as link sites for joining subsequent lower energy atoms forming an impermeable layer. The total heat delivery to the polymer is minimized thereby preserving integrity and continuity. The material is particularly useful in micromechanical devices where high flexibility is needed with complete sealing.

대표청구항 ▼

In a compliant diaphragm for fluid pressure transmission wherein the diaphragm is impermeable to a pressurizing fluid, the improvement wherein the diaphragm material is a compliant material, comprising: (A) a flexible layer of polymer sheet material having a first and a second side, and (B) a flexib

In a compliant diaphragm for fluid pressure transmission wherein the diaphragm is impermeable to a pressurizing fluid, the improvement wherein the diaphragm material is a compliant material, comprising: (A) a flexible layer of polymer sheet material having a first and a second side, and (B) a flexible metal layer adjacent and bound to the first side of the layer of polymer, the flexible metal layer having a depth and continuity to be impermeable to a pressurizing fluid.