초록 ▼

A permeable polymer membrane, formed of a fluorine type copolymer containing a repeating unit represented by the general formula: [Figure] (I) wherein m is 0 or 1 and n is an integer of the value of 2 to 5 and satisfying the relation between the water absorption ratio, W, and the ion-exchange capaci

A permeable polymer membrane, formed of a fluorine type copolymer containing a repeating unit represented by the general formula: [Figure] (I) wherein m is 0 or 1 and n is an integer of the value of 2 to 5 and satisfying the relation between the water absorption ratio, W, and the ion-exchange capacity, Q, represented by the following formula: 1.20Q-1.964WQ-1.742 wherein W is W2-W1)/W1, W1 a dry weight, W2 an equilibrium weight as immersed in pure water at 25°C., and Q an ion-exchange capacity in meq/g of H form dry resin. This permeable polymer membrane is capable of highly desiccating a gas to a low water content. By the use of the extremely desiccated gas, semiconductor elements, semiconductor devices, intermediates thereof, and new components can be produced with outstanding quality. This permeable polymer membrane can be produced by a heat treatment.

대표청구항 ▼

A method for the desiccation of a water-containing gas, which comprises: preparing a permeable polymer membrane formed of a fluorine type copolymer containing a repeating unit represented by the general formula: [Figure] wherein m is 0 or 1 and n is an integer of the value of 2 to 5, said permeable

A method for the desiccation of a water-containing gas, which comprises: preparing a permeable polymer membrane formed of a fluorine type copolymer containing a repeating unit represented by the general formula: [Figure] wherein m is 0 or 1 and n is an integer of the value of 2 to 5, said permeable polymer membrane being thermally treated at a temperature in the range of 60°C. to 250°C. and having a water absorption ratio, W, and an ion-exchange capacity, Q, which are represented by the following formula: 1.20Q-1.964WQ-1.742 wherein W is (W2-W1)/W1, W1 is a dry weight, W2 is an equilibrium weight as immersed in pure water at 25°C., and Q is an ion-exchange capacity in meq/g of H form dry resin in the form of a membrane; and bringing said gas into contact with one side of said membrane, and either bringing a dry purge gas into contact with the other side of said membrane or reducing the pressure on said other side of said membrane thereby removing water from said water-containing gas.